33
Item
Question
Response
EP sensor,
EP monitor
CC monitor
Can the set parameters be saved in the support software?
Can the continuous measurement data be saved in the
support software?
How long is the processing time for sampling data?
In setting the sensor measurement distance, what part of
the body is the distance measured from?
What is the electrostatic capacity of the ion balance
monitor plate?
What does the CC monitor do?
How does it differ from a particle counter?
Can it serve as a substitute for a particle counter?
What is the role of the LD monitor in the support software?
Can it be used in downflow environments?
What is the air flow rate for sampling?
Can it output the number of particles?
What is the measurement precision?
What are the specifications for the communication LAN
cable?
Can calibration be performed?
No, they cannot be saved.
Yes. Use Log
→
Star t, Save to save the continuous
measurement data.
In “averaged data output mode,” it is approx. 100 ms,
including averaging time, while in “actual measurement
data output mode,” it is approx. 30 ms.
It is the distance from the plastic surface of the body.
It is 10 pF.
The CC monitor checks the cleanliness level in clean
booths, etc., using simple detection of particles to display
the cleanliness level.
The par ticle counter is an instrument for measuring
particles. By contrast, the CC monitor is an instrument for
simple detection of particles.
It is not a substitute. The counter is for periodic (short-
term) measurement, while the monitor is for continuous
monitoring. Used in combination, they can facilitate the
early detection of causes when contamination troubles
occur.
It shows the operating life status of the detection laser.
Since measurement can be affected in environments with
wind speeds of 0.2 m/s [0.66 ft./sec.] or higher, use only in
environments with wind speeds below that level.
100 m
R
/min [6.1 in.
3
/min.].
No. It can only display the level of cleanliness.
Check the output characteristics graph in the CC Montor
Catalog No. BK-P017.
For a network connection, use a straight cable, and for a
one-to-one connection with a personal computer, use a
cross cable.
Since the CC monitor is not a measuring instrument,
calibration cannot be performed. However, Koganei is
ready to perform inspections and adjustments at customer
request. Customers desiring this service are requested to
consult with Koganei.
