M
M
M
E
E
E
R
R
R
C
C
C
U
U
U
R
R
R
Y
Y
Y
U
U
U
S
S
S
E
E
E
R
R
R
M
M
M
A
A
A
N
N
N
U
U
U
A
A
A
L
L
L
10
Back View
Disassemble
to maintain
#1 mirror.
Please refer to the
right layout.
Unscrew and
remove the
panel.
Unscrew and
remove the
dust prevention
box.
Unscrew and
pull out
#1 mirror
carefully
without
touching the
surface of the
mirror.
Step 1
Step 2
Step 3
Laser
source
inside
Back Panel
(Back Door)
Top Door
NOTE:
Please refer to Fig. 25 and follow the instruction
for the basic maintenance of mirror.
Motion System
