Laurell Technologies
Quick Start WS-650 Series 10/2011 – 10070193.revL
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distributed without express written permission from a corporate officer.
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STARTUP ERRORS
“LID OPEN”
message, close lid
If system is
installed but there
is insufficient
CDA or N2,
“NEED CDA”
message will
appear.
See section 3 in
manual for
programming
See section 4 in
manual for
maintenance and
errors
To hold a
substrate, press the
vacuum button on
keypad. If there is
insufficient
vacuum <15”
(381mm) Hg
(factory set point)
the “NEED
VACUUM”
message will
appear.