(2) Dimensions
MC-5100L, MC-5200L, MC-5250L
MC-5460L, MC-5470L
6. Ordering information
M C - 5 1 0 * L – M O – 4 J R 1 A A 0 A 0 – d d – e e – f f
[1]
[2]
[3]
[4]
[5]
[6]
[7]
[1] Series model MC: Mass Flow Controller Series
MC-5100L, MC-5200L, MC-5250L, MC-5460L, MC-5470L
*
Power connector orientation 0:
Side direction, 1:
Upper direction
[2] Valve mode
MO: Normally open (Precision polishing)
MC: Normally close (Precision polishing)
[3] Fitting size
4VR1:6.35VCR106, 4VR2:6.35VCR124, 4SWL:6.35SWL
SPW3: Surface mount 1.1.25W-Seal 79.8mm,
SPW4: Surface mount 1.125W-Seal 92mm
6JR3: 9.52UJR163.4mm, 4JR4: 6.35UJR156mm (Applied to MC-5460L and MC-5470L)
※ Please consult for more information.
[4] Optional
B: Applied to liquefied gas,
E: Small Range Control (1 to 4SCCM in nitrogen)
G:
Wide Range specifications (Control range 0.5 to 100 %F.S.)
J:
Valve is closed at below 2% setting, M: Applied to ClF3
※ Default setting is labeled “AA0A0”. Please consult for more information.
[5] Gas type
[6] Full scale flow rate
[7] Flow rate unit
SCCM (0 ºC standard), SLM (0 ºC standard)
7. Connection
(1) Device
Net™ connector: Pin type micro connector (IEC60947-5-2)
Pin No.
Signal name
Function
1
Drain
Shield
2
V+
Power supply 11 to 25VDC (+)
3
V-
Power supply (-)
4
CAN_H
CAN interface HI
5
CAN_L
CAN interface LO
(2) Rotary switch, LED (on top of the MFC housing)
8. Operation
Procedure
1)
This product is packed in a clean room before shipment. Please break the
seals in a clean room after taking it out of its box.
2)
Check the gas type and flow rate, and check the direction of the gas flow
and the MFC before installation.
3)
Check for gas leaks from the tubing with a helium (He) leak detector.
4)
Prepare a master for Device
Net™ and connect specified power, cable and
connector.
5)
Connect to the network.
6)
Turn on power supply and let the equipment warm up for at least 5 minutes
(Recommended time: 30min).
7)
Please power on the MFC for 30 mins, then conduct zero-point adjustment
without gas flowing
by pressing button on the top of device or software.
8)
Device starts controlling flow after inputting setting value by software and
introducing gas with the specific pressure.
9)
Complete shut off cannot be achieved with the mass flow controller. If
complete shut off is desired, a shut-off valve should be installed.
10)
When a highly reactive gas is used, thoroughly purge all foreign matter
from the tubing and the MFC before operation.
11)
When contaminated gas is used, install a filter at the equipment inlet.
9. Product warranty
(1) Period
This product is guaranteed for a period of 1 year from date of shipment. Defects
are repaired according to the following regulations.
(2) Scope
Warranty coverage is restricted to this product only. Any other damage caused
by this product is not covered.
(3) Disclaimer facts
The following repairs are not covered by the warranty:
1) Failure caused by by-product of fluid used.
2) Failure caused by misuse (including careless operation) or incorrect repair or modification.
3) Failure caused by dropping after purchasing.
4) Failure caused by a natural disasters.
Even if the warranty period is still in effect, the following items may not be repaired.
1) When the kind of fluid used in the product is unclear.
2) The product is returned with fluid remaining inside and safety cannot be
confirmed.
The MFC is a precision instrument. Control may become unstable if electric
noise, temperature change of fluid, pulsation of fluid pressure etc. occurs.
Please be forewarned.
This instruction manual is subject to revision without notice.
http://www.lintec-mfc.co.jp
Corporate Headquarters
4-1-23 Sekinotsu, Otsu City, Shiga Pref. 520-2277, Japan
TEL.
+81-(0)77-536-2210 FAX. +81-(0)77-536-2215
Tokyo Branch Office
3F Hattori Build., 4-30-14 Yotsuya Shinjyuku-ku Tokyo 160-0004, Japan
TEL. +81-(0)3-5366-2801 FAX. +81-(0)3-3341-3513
NET
Network Status
Network Status LED
MOD
Module Status
Module Status LED
ZERO ADJ.
Zero Adjustment
Zero Adjustment button
Display
Name
Description
Default
MSD
LSD
Node
Address
Decimal setting:
MSD: a digit in tens place
LSD: a digit in ones place
The setting number above 64 will be Software Set
Mode.
63
RATE
Data Rate
Baud rate switch
1: 125 kbps
2: 250 kbps
5: 500 kbps
Otherwise: Software set mode
5
