Chapter 6 Detector Specifications
6–2
6-1 Linear scale
The following types of scales can be used with the linear servo drive system.
•
Only some of the types are listed here. Note that the application may change due to changes in the
specifications and termination of production by the scale maker.
•
Select a scale from the scale maker's catalog, which satisfies the specifications given in 6-2 Scale
I/F unit specifications.
(1) Linear scales that can be used as single part
•
For absolute (absolute value) system (Battery unit not required)
Maker Scale
type
Scale
specifications (excerpt)
Mitsutoyo
AT342
Max. operation speed 110m/min., resolution 0.5µm
Heidenhain
LC191M
Max. operation speed 120m/min., resolution 0.1µm
(2) Linear scales usable as combination with MDS-B-HR scale I/F unit
•
For incremental (incremental value) system
Maker Scale
type
Scale
specifications (excerpt)
Mitsutoyo
AT342 (Special) Max. operation speed 110m/min., resolution 0.04µm
LS186
Max. operation speed 120m/min., resolution 0.04µm
LIDA181
Max. operation speed 480m/min., resolution 0.08µm
Heidenhain
LIF181
Max. operation speed 48m/min., resolution 0.008µm
∗
The resolutions listed above are for combination with the MDS-B-HR unit.
∗
When using the AT342 (special) scale, an absolute position system can be assembled even
when used in combination with the MDS-B-HR unit. Note that the resolution of the absolute
position recovered when the power is turned ON will be 0.5µm.