1. Overview
No. 99MBA091A
1-5
1.2.2
Cross-travel stage unit
IMPORTANT
The stage glass is made of glass to transmit the transmitted illumination light.
Do not bump the stage glass when installing a workpiece on it. If placing a heavy
workpiece with protrusions on the stage glass, exercise attention so as not to
scratch the glass.
9
)
Cross-travel stage
:
Mounts a workpiece on the XY stage; its stroke varies
depending on the MF model.
・
MF-
*
505C
50mmX 50mm
・
MF-
*
1010C 100mmX100mm
・
MF-
*
2010C 200mmX100mm
・
MF-
*
2017C
200mmX170mm
(
with swivel table
)
・
MF-
*
3017C
300mmX170mm
(
with swivel table
)
・
MF-
*
4020C
400mmX170mm
(
with swivel table
)
TIP
The MF-
*
505C
,
MF-
*
1010C
,
and MF-
*
2010C models have no table rotating
mechanism on the cross-travel stage. If necessary, use the fine-feed rotary table
(A) (No.176-305) from the optional accessories. The fine-feed rotary table (B)
(No.176-306) is also available as an option accessory for the MF-
*
2017C
,
MF-
*
3017C
,
and MF-
*
4020C models.
10
)
Linear scale
:
Three pieces of Linear scale are mounted on each of the X- and
Y-axes of the XY stage and the Z-axis column.
(
The Linear scale may not be
mounted on the Z axis of some models.
)
The displacement of the stage and optical
tube unit is displayed on the DRO counter.
11
)
X-axis fine feed wheel
:
Used to finely move the cross-travel stage along the X-axis
direction.
12
)
X-axis coarse-feed wheel
:
Used to quickly move the cross-travel stage along the
X-axis direction.
13
)
X-axis zero-set switch
:
A switch for zero-setting a X-axis display value on the
counter.
14
)
Y-axis fine feed wheel
:
Used to finely move the cross-travel stage along the Y-axis
direction.
15
)
Y-axis coarse-feed wheel
:
Used to quickly move the cross-travel stage along the
Y-axis direction.
16
)
Y-axis zero-set switch
:
A switch for zero-setting a Y-axis display value on the
counter.
17
)
Swivel knob
(
for MF-
*
2017C
,
MF-
*
3017C and MF-
*
4020C
)
:
Used to swivel the
XY stage up to
±
5
°
or
±
3
°
.
(
This knob is not provided for the MF-
*
505C
,
MF-
*
1010C and MF-
*
2010C models.
)
Summary of Contents for MF 1010C Series
Page 2: ......
Page 54: ...No 99MBA091A 3 14 MEMO ...
Page 66: ...No 99MBA091A 5 6 MEMO ...
Page 82: ...No 99MBA091A 6 16 c MF 2010C d MF 2017C Unit mm ...
Page 83: ...6 Specifications No 99MBA091A 6 17 e MF 3017C f MF 4020C Unit mm ...
Page 84: ...No 99MBA091A 6 18 6 8 2 Control unit a LED illuminator b Halogen illuminator Unit mm ...
Page 86: ...No 99MBA091A 6 20 d MF 2017C e MF 3017C Unit mm ...
Page 87: ...6 Specifications No 99MBA091A 6 21 f MF 4020C Unit mm ...
Page 88: ...No 99MBA091A 6 22 MEMO ...