Mitutoyo MF 1010C Series, User Manual

Page 1: ...MF series Measuring Microscope MF series User s Manual Hardware Guide Read this User s Manual thoroughly before operating the instrument After reading retain it close at hand for future reference No 99MBA091A2 SERIES No 176 ...

Page 2: ......

Page 3: ... serious injury or death WARNING Indicates a potentially hazardous situation which if not avoided could result in serious injury or death CAUTION Indicates a potentially hazardous situation which if not avoided may result in minor or moderate injury or property damage The following signs indicate specific warnings or prohibited actions or indicate a mandatory action Alerts the user to a specific h...

Page 4: ...NOTE A note emphasizes or supplements important points of the main text A note supplies information that may only apply in special cases e g Memory limitations equipment configurations or details that apply to specific versions of a program TIP A tip is a type of note that helps the user apply the techniques and procedures described in the text to their specific needs It also provides reference in...

Page 5: ...TION 1 The JIS JIS C 6802 established in 2005 and the International Standard IEC60825 1 established in 2001 are the safety standards for LED devices 2 The LED device is classified as Class 1 LED product in the JIS and IEC standards 3 Do not look into LED light Never look into LED light even when light is not emitted 4 Do not look at laser light directly with an optical instrument light condensing ...

Page 6: ...intenance Please do not carry the measurement thing of 18kg or more alone Please do not carry the measurement thing to exceed 18kg alone for safety though the maximum authorized freight mass of the stage is 20kg Power supply Observe the following precautions regarding the power supply As a rule the power distribution method should be a single phase two wire system with one wire grounded Pay due at...

Page 7: ...achine in locations where volatile gases could be generated Maintenance Gently wipe off dirt from the machine using a lint free and soft cloth If the dirt is difficult to remove wipe it clean with a cloth soaked in neutral detergent then wipe lightly with a dry cloth or a cloth well wrung after soaking in water Do not use organic solvents such as thinner or benzine Take special shielding measures ...

Page 8: ...f the ambient humidity is high rust will easily form on important machined surfaces and may affect electronic parts adversely Efforts should be made to retain humidity between 55 and 65 Dust and dirt The measuring microscope consists of high precision parts such as guide ways linear scale units and optical units that are apt to be easily damaged by dust and dirt Use the microscope at a site free o...

Page 9: ... gas abnormal voltage or natural catastrophe This Warranty is valid only in the country of original purchase Notes on Overseas Transfer This product is controlled by the Export Control Regulations Please contact Mitutoyo before transferring it abroad Before exporting this product confirm the final purpose of use at the export destination to prevent the product from being used for developing weapon...

Page 10: ...Installation 2 1 2 2 Remove the Fixing Plate 2 2 2 2 1 Removing the fixing plate for cross travel stage 2 2 2 2 2 Removing the fixing plate for optical tube unit 2 3 2 3 Moving the Table on the Cross Travel Stage 2 4 2 3 1 When a great and quick travel of the table is required 2 4 2 3 2 When a fine travel of the table is required 2 4 2 4 Moving the Optical Tube Unit 2 5 2 4 1 When a great and quic...

Page 11: ...1 Transmitted illumination 3 8 3 7 2 Vertical reflected illumination 3 8 3 7 3 Simultaneous use of transmitted and vertical reflected illumination 3 8 3 7 4 Oblique reflected illumination Optional oblique reflected illuminator is required 3 9 3 8 Selecting a Filter 3 10 3 9 Adjusting the Pupil Distance The case in which the binocular unit is mounted 3 11 3 10 Adjusting the Diopter of Eyepiece 3 12...

Page 12: ...jectives Eyepieces Specification Table 6 5 6 6 Layout of the Optical System 6 6 6 7 Serial Data Output Specifications of the Counter 6 7 6 7 1 Connector specifications 6 7 6 7 2 Control signal 6 7 6 7 3 Data output operation 6 9 6 7 4 Connecting Micropak 6 11 6 7 5 Connecting DPU 414 Printer 6 12 6 7 6 Connecting QM Data 200 6 14 6 8 External Dimensions 6 15 6 8 1 Main unit 6 15 6 8 2 Control unit...

Page 13: ...operation and eliminates the impact when switching coarse fine feed z The cross travel stage with a maximum stroke of 400 X 200mm is available as an option z Both right and left side of the optical tube unit is equipped with the coaxial fine feed focusing wheels This makes focusing operation easy z High resolution measurement is supported using the counter with a resolution of 0 1µm selectable fro...

Page 14: ... wheel 16 Y axis zero set switch 13 X axis zero set switch 12 X axis coarse feed wheel 14 Y axis fine feed wheel 19 Control panel 4 Reflected illumination switching knob 3 Reflected illumination aperture diaphragm knob Eyepiece 23 DRO counter 11 X axis fine feed wheel 18 Swivel clamp screw ...

Page 15: ...ice Requisite selection option This illustration represents an LED illuminator 5 Reticle 9 Cross travel stage 10 Linear scale Column Spare hole for mounting the counter 2 Binocular or monocular unit both are optional 1 Objective 15 Y axis coarse feed wheel 22 Rear connector panel 8 Z axis zero set switch 24 LED control unit or 25 Halogen control unit Requisite selection option ...

Page 16: ...owing sources the vertical reflected illuminator and the oblique illuminator option order No 176 351 6 5 Reticle Loosen the cross recessed truss head screws and remove the cover You will see the broken cross hair reticle with the standard line width of 5µm is mounted inside 6 Coarse fine focusing wheel This focusing wheel allows coarse or fine vertical travels of the optical tube for focusing The ...

Page 17: ...ion accessory for the MF 2017C MF 3017C and MF 4020C models 10 Linear scale Three pieces of Linear scale are mounted on each of the X and Y axes of the XY stage and the Z axis column The Linear scale may not be mounted on the Z axis of some models The displacement of the stage and optical tube unit is displayed on the DRO counter 11 X axis fine feed wheel Used to finely move the cross travel stage...

Page 18: ...he resolving power contrast and focal depth of the optical system Adjust the diaphragm to the optimal numerical aperture NOTE 1 For information about adjusting the aperture diaphragm refer to the instructions given in 3 4 Adjusting the aperture for transmitted illumination 2 Even when the auxiliary power switch is turned off feeble power is consumed If you do not use the product for a long time pl...

Page 19: ... instructions given in 4 3 1 Replacing halogen bulbs 2 For information about replacing LED bulbs refer to the instructions given in 4 3 2 Replacing LED bulbs 22 Rear panel Consists of the connectors to be connected to the control unit transmitted illuminator and reflected illuminator ａ Connector for control cable This connector is used to connect this unit and the cable connected to the control un...

Page 20: ... of cross travel stage and optical tube Resolution 0 001 0 0005 0 0001mm 0001 00005 00001 switchable ｂ Zero set button Zeroes the display value at any position Pressing the button makes the buzzer sound ｃ mm E or indicator LEDs Indicates the unit mm or E currently used A value in units of E is displayed by dividing a displacement in units of mm by 25 4 a Display unit c mm E indicator LEDs b Zero s...

Page 21: ...nects to Vision unit ｆ External illumination connector This connector is used to connect an external lighting source from the optional accessories LED ring illuminator twin fiber illuminator ring fiber illuminator ｇ External load connector Connects to external load switch ｄ Serial output connector 1 ｆ External illuminator connector ｅ Serial output connector 2 ｇ External load connector ...

Page 22: ...p or count down direction setup Ｆ０２ ３ Count direction of Z axis count up or count down direction setup Individual axis Each time the Y axis zero set button on the counter is pressed the display of UP or dn is selected displayed alternately and the count direction is switched Ｆ０３ Resolution setup All axes ０ １ Minimum readout of 0 1µm 0 00001 ０ ５ Minimum readout of 0 5µm 0 00005 １ ０ Minimum readout ...

Page 23: ...ification ２ ＡＳ ２axes ３ ＡＳ ３axes Ｆ０９ RS 232C output format setup Sets RS 232C data to the output format of Mitutoyo Vision unit or QM Data200 １ Standard use ２ Special use Ｆ１０ Setup for the illumination energy saving function Refer to NOTICE 2 Automatically turn off the illumination while not operating the microscope 0 None 10 Automatically turn off the light 10 minutes later 30 Automatically turn o...

Page 24: ...ime the X axis zero set button is pressed the parameter display changes to the next in incremental order The parameters are looped Switching parameter settings Ｙ ０ １ ０ ５ １ ０ ０ １ For a resolution Each time the Y axis zero set button is pressed the parameter setting changes to the next The parameter settings are looped Exiting the parameter setup mode Loading the set content Ｘ Ｙ Keep pressing the X ...

Page 25: ...ct the setting here dn unlike the present setting here UP Setting the count direction Reverse the count direction of Y axis Ｘ Ｙ 1 Press the X axis zero set button to select parameter F02 2 2 Press the Y axis zero set button to select the setting here UP unlike the present setting here dn Setting the count direction Reverse the count direction of Z axis Ｘ Ｙ 1 Press the X axis zero set button to sel...

Page 26: ...ct parameter F07 2 2 Press the Y axis zero set button to select 7 b Setting the RS 232C communication condition Select the even parity Ｘ Ｙ 1 Press the X axis zero set button to select parameter F07 3 2 Press the Y axis zero set button to select En Setting the RS 232C Communication condition Select one stop bit Ｘ Ｙ 1 Press the X axis zero set button to select parameter F07 4 2 Press the Y axis zero...

Page 27: ... Front panel of control unit common to LED halogen ａ Main power switch This switch is used to supply power to the whole system NOTE To shut off the power completely turn off the main power switch Rear panel of control unit LED control unit a Main power switch b AC inlet d DIN connector 2 for external light c DIN connector 1 for external light e Connector for control cable f USB connector ...

Page 28: ...USB connector This connector is not used ｇ Connector for vertical reflected illuminator halogen This connector is used to connect a halogen type transmitted illuminator ｈ Connector for transmitted illuminator halogen This connector is used to connect a halogen type transmitted illuminator b AC inlet d DIN connector 2 for external light c DIN connector 1 for external light e Connector for control c...

Page 29: ... Mitutoyo handles and sets up the machine because it is necessary to confirm and adjust the accuracy after installation NOTE On the Reinstallation The microscope main unit reinstallation performed on the client s own may deteriorate the required accuracy due to vibrations and shocks during transportation Therefore it is recommended that the main unit be reinstalled by Mitutoyo If the system is des...

Page 30: ...2 1 Removing the fixing plate for cross travel stage Remove eight pieces of fixing plate one piece for MF 505C MF 1010C and MF 2010C from the XY stage Use a 3mm Allen wrench For MF 2017C MF 3017C and MF 4020C For MF 505C MF 1010C and MF 2010C Fixing plate Fixing plate same numbers in the opposite side Fixing plate same numbers in the opposite side ...

Page 31: ...2 Installation and setup No 99MBA091A 2 3 2 2 2 Removing the fixing plate for optical tube unit Remove a fixing plate from the optical tube unit Use a 3mm Allen wrench Fixing plate ...

Page 32: ...e feed wheel side to unlock the table Hold the coarse feed wheel until the table moves to the required position Turn the wheel counterclockwise to lock the table IMPORTANT When moving the table do not make the impact on the stopper of stroke end If the stroke end stopper is hit the accuracy may decrease 2 3 2 When a fine travel of the table is required Turn the fine feed wheel until the table move...

Page 33: ...ne feed wheel with a small diameter until the optical tube unit moves to the required height The unit moves 0 2mm per full rotation of the wheel This operation is necessary for final focusing of the optical tube NOTE 1 Exercise sufficient care when the optical tube unit descends so as not to hit a work piece by lens or the optical tube unit 2 Do not turn both coarse feed wheels simultaneously in t...

Page 34: ... pieces on both sides of the rear bottom one piece on rear center to the direction that they are tightened up using a screwdriver etc Especially tighten the two pieces on both sides of the rear bottom almost fully so that they may not interfere with the installation surface Place a level on the stage glass to level the main unit by three leveling screws front two pieces rear center one piece After...

Page 35: ...tube clamp screw to secure the binocular unit NOTE When attaching or detaching the eyepiece unit be sure to tighten or loosen the clamp screw while holding the unit by hand If not the unit may drop possibly damaging the instrument or a work piece 2 6 2 Mounting the monocular unit Loosen the optical tube clamp screw while holding the eyepiece unit by hand then dismount the eyepiece unit This proced...

Page 36: ...nit Remove the cap from the eyepiece mount to mount the eyepieces 2 7 2 2 For the monocular unit Remove the cap from the eyepiece mount to loosen the eyepiece clamp screw Insert the eyepiece and fix it by the clamp screw TIP Some optional eyepieces are supplied with a monocular optical tube such as Protractor eyepiece etc In this case loosen the monocular tube clamp screw to remove the standard mo...

Page 37: ...PORTANT 1 Do not turn on the light when the transmitted illuminator and vertical reflected illuminator are removed from the main unit After turning on the illuminator it becomes very hot Do not illuminate upward otherwise the cable will be deformed by the heat 2 Do not place anything on the illuminator ant its peripheral part The efficiency of the air cooling fan decreases and a trouble will resul...

Page 38: ...ing on the illuminator it becomes very hot Do not illuminate upward otherwise the cable will be deformed by the heat 2 Do not place anything on the illuminator ant its peripheral part The efficiency of the air cooling fan decreases and a trouble will result Transmitted illuminator Vertical reflected illuminator Connector for transmitted illuminator Connector for vertical reflected illuminator ...

Page 39: ...on such that the counter display is difficult to view or the keys are not easy to operate Loosen the clamp screw on the flange located between the counter and the column rotate the counter to a desired angle and then tighten the clamp screw Also the counter of this microscope is able to be mounted on the right side of the column to meet the client s needs for operability If the client needs to cha...

Page 40: ...utlet 2 10 Connecting Each Part Connect the cables of each part according to the following figure Connect the microscope main unit and control unit with the control cable Plug the power cord into the control unit then plug the power plug into the power outlet ...

Page 41: ... illumination knobs clockwise to confirm that both illuminators light up Turn the transmitted and vertical reflected illumination knobs clockwise to confirm that both illuminators light up IMPORTANT The counter may display error messages E51 E52 E53 due to the procedure for turning ON OFF the power supply of the microscope main unit and the peripheral equipment such as PC in the connection with so...

Page 42: ...nd insert the bulb all the way until it reaches the end of the socket after the bulb becomes cool 3 3 2 Confirming the filament position of the halogen transmitted illuminator Mount a low magnification objective Turn the light on by turning the transmitted illumination knob Fully open the aperture diaphragm for transmitted illumination Remove the eyepiece to look into the objective from the optica...

Page 43: ... eyepiece and looking into the optical tube with an appropriate light intensity Adjust the required aperture NOTE Do not set the aperture diaphragm less than 60 of the radius except for special types of workpieces It reduces the resolution To avoid diffraction set the aperture diaphragm more than 15 except for special types of workpieces Aperture diaphragm knob for transmitted illumination Apertur...

Page 44: ...surement Aperture D 19 224 D Corresponds to the aperture setting 1 to 25 indicated on the aperture diaphragm knob on the control panel of the measuring unit d Workpiece diameter d2 Pitch diameter of screw thread α Screw thread angle The following graph shows the correlation between the workpiece diameter d and the optimal aperture setting D Adjust the aperture diaphragm knob to the optimal positio...

Page 45: ...ctive as above can be seen by removing the eyepiece and looking into the optical tube with an appropriate light intensity Push and pull a knob of aperture diaphragm to adjust the numerical aperture NOTE Do not set the aperture diaphragm less than 60 of the exit pupil radius except for special types of workpieces This will reduce the resolution Aperture setting for obtaining a good contrast and ima...

Page 46: ...hock while setting up a workpiece may break the stage glass resulting in damage and personal injury Exercise care so as not to bump the measuring unit during setup 2 A workpiece that extends over the end of the XY stage can interfere with the main unit when the stage moves Carefully mount the fixture on the stage 3 If a large size of cross travel stage such as MF 2017C MF 3017C and MF 4020C is mov...

Page 47: ...r B No 176 310 is used for MF 2010C and the stage adapter No 176 304 is used for MF 2017C MF 3017C and MF 4020C to be secured on the stage with tapped holes as shown below The fixture is secured using T groove of the adapter 3 For information about the dimensions of stages refer to the XY stage in 6 8 External Dimensions Stage adapter T groove dimension figure Stage adapter Stage adapter B Stage a...

Page 48: ...e optic axis direction The magnification error by the focusing does not occur 3 7 2 Vertical reflected illumination Used for surface measurement and inspection The surface should not be excessively rough A Koehler system 2 is employed and its advantages are fully utilized when measuring the surface of mirror finish workpiece TIP 2 What is Koehler system Illumination which placed the optical system...

Page 49: ...ece surfaces which are not smooth Since this method forms a stereoscopic image of the workpiece it is also used for inspecting surface conditions scratches Adjust the angle of light so that the brightest image is obtained in the field of view Draw out the reflected illumination switching knob as shown below when using this illumination Reflected illumination switching knob ...

Page 50: ...ing the color temperature of a light source The ND2 filter will reduce the light intensity to 1 2 and the ND8 will reduce it to 1 8 This filter is effective in observation and capture of color images under the reflected illumination environment ＧＩＦ Green interference filter One of interference filters with multi layer films evaporated This filter transmits only green spectral wavelength light with...

Page 51: ...yepieces employ a high eye point system with rubber eye cups attached Turn the rims outward as shown in the below figure if you wear eyeglasses 2 The binocular unit is supplied with polyethylene caps to shut off the light from the eyepieces during use of the TV port and for dust preventive purpose during storage The cap is also supplied for the monocular unit Cover each polyethylene cap over the e...

Page 52: ...t the unit all the way into the slot with the fingertip hooking groove on the reticle unit orienting upward Loosen the reticle cover clamping screws slightly and slide the cover upward to remove the reticle NOTE 1 The reticle unit should always be inserted in the slot If the reticle unit is not inserted an error may occur in the diopter 2 If the reticle unit is not completely inserted all the way ...

Page 53: ...ermined from the displacement of the XY stage The basic measuring procedure is as follows Move the XY stage as one edge of workpiece meets the cross hair Press the zero button of the X axis to set the counter zero Move the XY stage as the other edge of workpiece meets the cross hair Take a reading from the counter Dimension to be measured ...

Page 54: ...No 99MBA091A 3 14 MEMO ...

Page 55: ... or chemically treated cloth for cleaning since the surface may discolor and the paint may peel 4 2 Maintaining the Lens Always keep the lens clean and free of dust oil and fingerprints If the lens got contaminated wipe them according to the following procedure Dust Gently wipe it with a clean lens brush soft brush or gauze Oil fingerprints Gently wipe with tissue paper for the lens or a gauze dam...

Page 56: ...IMPORTANT The bulbs and the peripherals stay hot for a period after use Be sure to perform the above procedures and check that the bulbs have cooled then proceed to the next step 3 Turn off the power switch and pull out the power cord IMPORTANT Serious injury and risk of electrocution will result if cover is opened while power is on 4 Loosen and remove two fixing screws for the head cover of illum...

Page 57: ... with the oil etc resulting in the short life of the bulb Insert the bulb all the way until it reaches the end of the socket If not inserted well enough uniform illumination can not be obtained IMPORTANT Use only the specified halogen bulbs Unspecified halogen bulb may prevent the machine from performing efficiently TIP For information about the halogen bulbs type refer to 6 3 List of Consumable ...

Page 58: ... after turning off the power and confirming that the bulb is cooled 2 Turn off the main power switch and pull out the power cord IMPORTANT Replacement operation in the power on state may cause trouble resulting in harm to the operator 3 Remove the connector of the LED illuminator from the rear of the main unit base 4 Remove the illuminator unit from the microscope main unit 5 Connect the connector...

Page 59: ...s travel stage Gently fit a new stage glass in the frame of the stage Carefully tighten the fixing screws so the stage glass will not move NOTE 1 If replacing the stage glass be careful so as not to break it 2 Do not touch directly the stage glass with your bare hands due it is easy to get contaminated by fingerprints etc Wear gloves Glass retainer Glass fixing screw Stage glass ...

Page 60: ...he spring bracket and conston spring together with a gap maintained using the hexagon socket head cap screws 2 pieces and hexagon nuts 2 pieces If there is no gap the wire cannot be evenly pulled 10 Engage the wire with the spring bracket using the cross recessed truss head screw and collar 11 Insert a driver into the work hole of the spring bracket pull the conston spring upward and engage the wi...

Page 61: ...bration are generated 1 Check if the legs on the main unit installation stand are loose 2 Check if the main unit installation stand is not level 1 Tighten the legs on the main unit installation stand correctly 2 Perform leveling of the main unit installation stand 4 The measurement data will not be steady 1 Check if the stage glass is fixed 2 Check if the lens is loosened 3 Check if the workpiece ...

Page 62: ...category in Malfunction column 1 Securely ground the wire from the main unit GND terminal 2 The counter should be separated by at least 0 5m from high voltage or large current sources and high capacity relays 3 If the counter or any Linear Scale is found to be damaged contact your dealer or the nearest Mitutoyo sales office 4 Count value fluctuates 1 Are vibrations affecting the Linear Scales 2 Is...

Page 63: ...oyo sales office 1 Replace the halogen bulb 2 Replace the bulb with new bulb with the same rating 1 Disconnect the illuminator once and re connect it securely 2 Disconnect the illuminator once and re connect it securely 3 Turn on the main power switch 4 Turn on the auxiliary power switch 5 Disconnect the cable once and re connect it securely 6 Restart the power of the microscope If the same sympto...

Page 64: ... button or send C0 zero command by RS 232C from peripheral devices such as PC Restart both of the peripheral devices and the microscope main unit when the communication is not resumed RS232C over run error Press the X axis zero set button or send C0 zero command by RS 232C from peripheral devices such as PC Restart both of the peripheral devices and the microscope main unit when the communication ...

Page 65: ...the connector of the illuminator and connect it again If the same error is detected again contact your dealer or the nearest Mitutoyo sales office 2 times beep 2 off 4 The fan integrated into the transmitted illuminator is restrained or the connector of the fan is not connected Turn off the main power and check whether a foreign object interferes with the fan or disconnect the connector of the ill...

Page 66: ...No 99MBA091A 5 6 MEMO ...

Page 67: ...r inlet connector 100 240V Illumination filter Detachable attachable green filter 1 piece supplied detachable attachable for both reflected and transmitted illuminators Control panel Power switch accessible sub switch for operation Adjustable aperture diaphragm Transmitted Transmitted illuminator OFF Non step Reflected illuminator OFF Non step Traverse range 150 mm 5 9 220 mm 8 7 Z axis Feeding me...

Page 68: ...er 4 select any one kind 12BAD487 Hanger bolt 2010 less 12BAG808 Hanger bolt L 2017 over 4 select any one kind 12BAG897 Setting piece 2017 over 5 538615 Allen wrench nominal 2 5 1 538616 Allen wrench nominal 3 1 353491 Philips screwdriver 1 6 2 2 Standard accessories for illuminator Order No Item name Quantity 02ZAA000 Power cord home 02ZAA010 Power cord UL CSA 02ZAA020 Power cord CEE 02ZAA030 Pow...

Page 69: ...on Made by OSRAM Co 64602 Stage glass 12BAD381 For MF 505C Stage glass 12BAD381 For MF 1010C Stage glass 12BAD760 For MF 2010C Stage glass 12BAD363 For MF 2017C Stage glass 12BAD330 For MF 3017C Stage glass 12BAH968 For MF 4020C Conston spring 12BAD284 LED transmitted illuminator 12AAJ720 For transmitted illumination cooling fan equipped LED reflected illuminator 12AAJ721 For vertical reflected il...

Page 70: ...66 1 Ring fiber optic illuminator 12AAG806 GIF filter for 100W illumination 12AAG807 LB80 filter for 100W illumination 172 197 Swivel center support 176 304 Stage adapter 176 310 Stage adapter B 264 145 1 QM Data200 12AAA807 RS 232C cable 359 737 Vision unit 9B export 12AAD128 External light source control cable for 100W light source 12AAG888 External light source control cable for 150W light sour...

Page 71: ...8 86 9 45 x 5 3 69 2 60 x 4 60 4 5 x 0 13 61 2 1 50 4 8 38 3 75 x 3 2 30 9 100 x 2 4 27 3 10 x 0 21 51 1 3 100 2 4 13 150 x 1 6 10 8 200 x 1 2 9 6 20 x 0 42 20 0 7 200 1 2 3 3 300 x 0 8 2 7 400 x 0 6 2 4 50 x 0 55 13 0 5 500 0 48 1 4 750 x 0 32 1 3 1000 x 0 24 1 2 100 x 0 70 6 0 4 1000 0 24 0 8 1500 x 0 16 0 7 2000 x 0 12 0 7 Note M Magnification N A Numerical aperture W D Working distance mm R Re...

Page 72: ...No 99MBA091A 6 6 6 6 Layout of the Optical System Aperture diaphragm Workpiece surface Objective position Intermediate image Intermediate image Filament Reticle Aperture diaphragm Filament ...

Page 73: ...SCII Parity bit Even 1 Odd None Stop bit 1 bit 1 2 bits Flow control Enabled Disabled 1 1 Default setting at the shipment 6 7 1 Connector specifications Connector shape Pin number Signal I O direction 2 Description 1 2 RD IN Accept the command 3 TD OUT Measured data 4 DTR OUT Counter is ready 5 SG Signal ground 6 DSR IN Peripheral is ready 7 8 9 FG Frame ground 2 In Out direction OUT counter Perip...

Page 74: ...s control lines Cable 1 Control lines are not used Pin number Signal name Pin number Signal name 1 N C 1 DCD 2 RD 2 RXD 3 TD 3 TXD 4 DTR 4 DTR 5 SG 5 GND 6 DSR 6 DSR 7 N C 7 RTS 8 N C 8 CTS 9 N C 9 RI Cable 2 Control lines are used Pin number Signal name Pin number Signal name 1 N C 1 DCD 2 RD 2 RXD 3 TD 3 TXD 4 DTR 4 DTR 5 SG 5 GND 6 DSR 6 DSR 7 N C 7 RTS 8 N C 8 CTS 9 N C 9 RI Counter unit Count...

Page 75: ...al computer List of command from peripheral 2 Output format The Output data is output in the specified format Below are given output examples of various kinds of data for a signal axis counter and multi axes counter １ Single axis counter output A If 123 4567 is displayed on the X axis counter B If 0 0000 is displayed on the Y axis counter ２ Multi axes counter output A coordinate data of each axis ...

Page 76: ...he un defined command Correspond by the normal command E20 X axis overspeed arising 1 Press the X axis zero set button 2 Transmit C0 zero command E20 Y axis overspeed arising 1 Press the Y axis zero set button 2 Transmit C0 zero command E20 Z axis overspeed arising 1 Press the Z axis zero set button 2 Transmit C0 zero command F30 X axis overcount arising F30 Y axis overcount arising F30 Z axis ove...

Page 77: ...et Equipment Counter Counter connected Others Counter 100ms Set Conditions Measuring Rang X Y Z ４ Micropak 5 setup Set the Dip switch DPS1 and DPS2 according to the following DPS1 No 1 ON No 2 OFF No 3 OFF No 4 OFF 4800 bps DPS2 No 5 ON No 6 OFF Modify also the parameter setup of the counter simultaneously Set 4800bPS at the parameter number F07 1 according to 1 2 4 1 About parameters NOTE To conn...

Page 78: ...Paper feed SW Input method Serial CR CR Printing density 100 ON LINE Dip SW 2 Setting of SW2 ON LINE ON LINE ON LINE ON LINE ON LINE ON LINE ON LINE ON LINE on on on on on on on on Continue Push On line SW Write Push Paper feed SW Normal printing 40 columns Japanese ON LINE Dip SW 3 Setting of SW3 FEED FEED FEED FEED FEED ON LINE ON LINE ON LINE off off off off off on on on Continue Push On line S...

Page 79: ...g Default setting up of MF counter at shipment has no need to be changed however confirm the communication condition setting of MF counter if printing does not start Printing operation Pressing the foot switch option enables to print the value of the axis on which is set up output by MF counter MF Counter Foot switch option 12AAA846 SERIAL EXT LOAD SERIAL Attached connecting cable 02AGD620A DPU 41...

Page 80: ...g of QM Data 200 becomes the following communication condition Baud Rate 9600 bps Communication Condition EVEN 7 1 Flow Control DTR DSR Terminator CR LF 2 Axis Configuration 1 X Y or 2 X Y Z depending on the axis configuration of the microscope NOTE When QM Data 200 starts the counter display of microscope goes off and LED of mm E display at the counter blinks on and off The switches on the micros...

Page 81: ...6 Specifications No 99MBA091A 6 15 6 8 External Dimensions 6 8 1 Main unit a MF 505C b MF 1010C Unit mm ...

Page 82: ...No 99MBA091A 6 16 c MF 2010C d MF 2017C Unit mm ...

Page 83: ...6 Specifications No 99MBA091A 6 17 e MF 3017C f MF 4020C Unit mm ...

Page 84: ...No 99MBA091A 6 18 6 8 2 Control unit a LED illuminator b Halogen illuminator Unit mm ...

Page 85: ...6 Specifications No 99MBA091A 6 19 6 8 3 Cross travel stage a MF 505C b MF 1010C c MF 2010C Unit mm ...

Page 86: ...No 99MBA091A 6 20 d MF 2017C e MF 3017C Unit mm ...

Page 87: ...6 Specifications No 99MBA091A 6 21 f MF 4020C Unit mm ...

Page 88: ...No 99MBA091A 6 22 MEMO ...