MKS Granville-Phillips 203 Series Instruction Manual Download

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Granville-Phillips

Variable Leak Valve

Instruction manual part number 203026

Revision B - November 2016

Series 203

Instruction Manual

Customer Service / Technical Support:

MKS Pressure and Vacuum Measurement Solutions

MKS Instruments, Inc., Granville-Phillips

Division

6450 Dry Creek Parkway
Longmont, Colorado 80503 USA
Tel: 303-652-4400
Fax: 303-652-2844
Email: mks@mksinst.com

MKS Corporate Headquarters

MKS Instruments, Inc.
2 Tech Drive, Suite 201
Andover, MA 01810 USA
Tel: 978-645-5500
Fax: 978-557-5100
Email: mks@mksinst.com

Summary of Contents for Granville-Phillips 203 Series

Page 1: ...Series 203 Instruction Manual Granville Phillips Variable Leak Valve Instruction manual part number 203026 Revision B November 2016...

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Page 3: ...red trademarks are the properties of their respective owners Customer Service Technical Support MKS Pressure and Vacuum Measurement Solutions MKS Instruments Inc Granville Phillips Division 6450 Dry C...

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Page 5: ...1 Conductance 3 3 2 Throughput 3 3 3 Maximum Inlet Pressures 3 3 4 Gases Controlled 3 3 5 Materials 3 3 6 Temperature 4 3 7 Vacuum Connections 4 4 Installation 4 5 Operation 5 6 Removing the Driver 5...

Page 6: ...ii Series 203 Variable Leak Valve Installation and Operating Instructions...

Page 7: ...ped or not connected to the vacuum system Do not use cork stoppers or adhesive tape 2 3 Carefully exclude dust dirt chips moisture and other contaminants A liquid seal formed from condensed vapors on...

Page 8: ...5 High temperature bake the Leak valve body only when the Driver Assembly is removed and the Leak held open with a bake out clamp 2 6 Stable ambient temperature is necessary to maintain conductance at...

Page 9: ...flow rates some gas will continue to emerge from the seal for several minutes even though the seal is mass spectrometer leak tight This is a normal condition with metal to metal seals 3 2 Throughput...

Page 10: ...lable are versions using Cajon VCR and VCA fittings 4 Installation Use every precaution to prevent contamination from entering the Leak Keep plastic caps or rubber stoppers on the valve ports until th...

Page 11: ...t be removed for bakeout 6 1 Remove the name plate 6 2 Turn the driver handle until the counter reads approximately 150 digits above the previous sealing point to relieve all thrust on the nosepiece 6...

Page 12: ...n 30 and 50 inch ounces torque If a leak detector is not available close the valve in small increments until a satisfactorily low conductance is attained 8 6 With the driver in the sealed position rem...

Page 13: ...ings Relubricate the contact surfaces of the worm and gear and drive screw with molybdenum disulfide Reassemble Remove the retracting screw Loosen the set screw in the aluminum bushing and rotate one...

Page 14: ...ided the item is returned to Granville Phillips Company together with a written statement of the problem 13 Specifications Materials Seal Pure silver All other interior surfaces 304 Stainless Steel Ph...

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Page 16: ...l Support MKS Pressure and Vacuum Measurement Solutions MKS Instruments Inc Granville Phillips Division 6450 Dry Creek Parkway Longmont Colorado 80503 USA Tel 303 652 4400 Fax 303 652 2844 Email mks m...