MKS HPS 903 Series, Operation And Maintenance Manual

Page 1: ...Inverted Magnetron Transducer IMT Cold Cathode Ionization Vacuum Sensor OPERATION AND MAINTENANCE MANUAL HPSTM Products Series 903...

Page 2: ...se Note MKS Instruments provides these documents as the latest version for the revision indicated The material is subject to change without notice and should be verified if used in a critical applicat...

Page 3: ...Cold Cathode Ionization Vacuum Sensor HPSTM Products Series 903 Inverted Magnetron Transducer IMT Cold Cathode Ionization Vacuum Sensor JUNE 1999 PART 1090300 REV A...

Page 4: ...de of the housing 1999 MKS Instruments Inc HPSTM Products Inc All rights reserved ALCONOXisaregisteredtrademarkofAlconox Inc IgniTorr is a trademark of MKS Instruments Inc HPSTM Products Inc Inconelis...

Page 5: ...onnection 9 Electrical Connection 9 Input OutputWiring 9 Relay Inductive Loads and Arc Suppression 11 Operating the Series 903 IMT 12 Starting the IMT 12 Reading Pressure 12 Equation for Converting Vo...

Page 6: ...Cold Cathode Ionization Vacuum Sensor Accessories Part Replacement 22 Product Warranty 23 Notes 24 Appendix A How the Series 903 IMT Works A 1 Theory of a Cold Cathode Ionization Sensor A 1 Notes A 3...

Page 7: ...ed in shipping notify the carrier immediately Keep all shipping materials and packaging for claim verification Do not return the product to HPSTM Package Contents t t t Symbols Used in this Manual The...

Page 8: ...information on page 9 for proper connection instructions The IMT may be connected only to devices conforming to the requirements of a secondary extra low voltage in accordance withEN61010 1 Allow only...

Page 9: ...idity 80 maximum for temperatures less than 31 C decreasing linearly to 50 maximum at 40 C Altitude 2000 m 6561 ft maximum Insulation PollutionDegree2 Controls 1 relay set point RelayContactRating SPD...

Page 10: ...posed to Vacuum SS 304 SS 302 aluminum glass Inconel X 750 alumina ceramic Display LED indicators for set point red high voltage yellow and power green ElectronicCasing ABS plastic UL 94 5V flame rati...

Page 11: ...LED High Voltage Indicator Yellow LED Set Point Indicator Red Phillips Head Screws Access to Sensor Tube Set Point Adjustment Potentiometer Tip Jack for Set Point Monitor Tip Jack for Common Male 9 p...

Page 12: ...pressure and taking appropriate security measures using the relay set point Controlling system pressure using the analog output as input to an automatic pressure controller Starting or stopping syste...

Page 13: ...r Its rapid response and wide measurement range provide the equipment designer with maximum flexibility Because it can operate autonomously or as part of a control system it is adaptable to several ro...

Page 14: ...lignment of the feed through pins with the orientation of the electronics assembly as shown to the right Before assembling the IMT inspect the pins to make sure they have not been bent Straighten them...

Page 15: ...Ensure a low impedance electrical connection between the IMT and the grounded vacuum system to shield the sensor from external electromagnetic sources Input Output Wiring The chart and accompanying f...

Page 16: ...drop from this current The longer the cable the worse the error will be To enable the high voltage with an external switch connect pin 9 to the power supply input pin 4 An open connection turns off th...

Page 17: ...troller operation or reduce relay contact life Therefore an arc suppression network shown schematically below is recommended The values of the capacitance C and the resistance R can be calculated by t...

Page 18: ...cessories p 22 Reading Pressure To measure nitrogen gas pressure with the IMT turn the power on and start the high voltage Refer to the graph below showing pressure as a function of output voltage for...

Page 19: ...8 000 for microns 8 875 for Pascal Using the Set Point Attach a digital voltmeter to the Common tip jack and the Set Point tip jack on the IMT as shown below Adjust the potentiometer with a small scr...

Page 20: ...g to Digital A D Converter To take full advantage of the IMT s capabilities an A D converter with an input voltage span of 0 to 10 V may be used A resolution of 12 bits is needed corresponding to 2 44...

Page 21: ...e leak or moving quickly past the leak can confuse the search since time lags may be significant 3 Note the pressure reading The pressure will either rise or fall depending upon the ionization potenti...

Page 22: ...of a Cold Cathode Ionization Sensor The Series 903 IMT is calibrated to give a voltage output for air or nitrogen according to the graph on page 12 or the equation on page 13 If used with another gas...

Page 23: ...shown on the graph on the previous page you need to calibrate the IMT This requires a gas independent sensor such as a capacitance manometer or spinning rotor gauge to act as the calibration standard...

Page 24: ...ting time Consider purchasing an IgniTorr 2 Beyond range Increase pressure if desired 1 Check cable connection 2 Turn power on 1 Increase supply voltage to provide 14 to 30 V at the IMT 1 Check set po...

Page 25: ...the compression spring while rotating it to free it from the formed groove of the sensor body Continue to pull until the compression spring is completely free 4 Carefully remove the remaining compone...

Page 26: ...spacer into place The grid washer has a concave shape Refer to the figure to see its installation orientation 4 Insert the small end of the compression spring into the sensor body Using your thumbs pu...

Page 27: ...21 Cold Cathode Ionization Vacuum Sensor 12 l 7 l 13 l 1 l 9 l 2 l 3 l 5 l 6 l 12 l 11 l 8 l 10 l 14 l 4...

Page 28: ...her GroundShield 1 Small and 1 Large Ceramic Spacer Spring Rebuild Sensor KF 40 104230101 2 CF 104230102 1 Tube 104230103 KF 25 104230104 HPSTM Series 903 Inverted Magnetron 109030025 Transducer IMT C...

Page 29: ...product for which paid or unpaid service is desired if the product is contaminated with potentially corrosive reactive harmful or radioactive materials gases or chemicals When products are used with t...

Page 30: ...24 Cold Cathode Ionization Vacuum Sensor Notes...

Page 31: ...a hot cathode sensor which has three The cold cathode magnetic discharge sensor consists of a cathode and anode with a potential difference of several kilovolts The electrodes are surrounded by a mag...

Page 32: ...scharge at low pressures sensors of the loop anode design do not work well below 10 6 Torr To reduce this problem a cylindrical anode cathode plates at each end and a cylindrical magnet are used Durin...

Page 33: ...A 3 Cold Cathode Ionization Vacuum Sensor Notes...

Page 34: ...A 4 Cold Cathode Ionization Vacuum Sensor...

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