Document No 50398-001 Rev F 02 Aug 2020
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2.1.7 Final Setup Steps
1.
Once the beam is aligned remove the alignment tool and switch from the guide beam to the high power beam.
2.
Enable live Playback from the Source Ribbon in the software.
3.
Adjust the gas level until a minimum
amount of particulates can be seen. This
may be an iterative process. Particulates
appear as a streak of high intensity light
when viewing the beam, often saturating
the image. A weak flow is not effective, and
too strong of a flow can become turbulent.
4.
Check the 2D Beam Display and make sure
the beam falls within the Focal Plane
Region Bounds (±350µm for High Mag
units, and ±1000µm for Low Mag units).
The beam should be aligned within these
bounds, in both views, to get the strongest
results.
The diagram below shows how various degrees of misaligned beams appear on the screen.
The
red
beam is off in the view of the Y axis. It needs to be moved down and left to center.
The
blue
beam is off in both axes and appears close to the insides of the views. It needs to be moved up to
center.
The
purple
beam is off in the view of the X axis. It needs to be moved down and right to center.
The
green
beam represents a perfectly aligned beam.
The
orange
lines represent the field of view of each axis.
