Nanomotion HR8, User Manual

Page 1: ...Nanomotion Ltd POB 223 Yokneam 20692 Israel Tel 972 4 959 0862 Fax 972 4959 0995 Web Site www nanomotion net E mail nano nanomotion com HR8 Ultrasonic Motor User Manual P N MSP8 M00 M00 40 ...

Page 2: ...Nanomotion Ltd POB 223 Yokneam 20692 Israel Tel 972 4 959 0862 Fax 972 4959 0995 Web Site www nanomotion net E mail nano nanomotion com ...

Page 3: ...eneric Immunity Standard NOTE UHV motors are designed for convenient interface to the UHV setup The motors are therefore supplied with three open electrical leads Whereas standard motors comply with CE regulations and the UHV motors have the same internal design as standard motors the UHV motors are supplied as components and CE conformity in both EMI and Safety must be implemented as part of the ...

Page 4: ... motors Warranty The motors are covered by warranty for a period of twelve months from the date of invoice The following voids the warranty Misuse or incorrect mounting incorrect electrical connections removal of motor cover or of serial number modification of parts and any other use that is not according to the cautions and warnings provided in this guide Liability for replacement will be determi...

Page 5: ...ion of motion Align accordingly Do not set power on unless motor is mounted and preloaded Do not immerse the motor in any liquid or cleaning agent Use only a clean cloth to wipe the motor Be sure that the motor and specifically the finger tips are not subjected to mechanical shocks Be sure that the distance of the motor to the plate enables the motor finger tip to contact the driving plate otherwi...

Page 6: ...to the Stage 2 4 2 2 2 Mounting the Motor 2 7 2 2 3 Motor Grounding 2 9 2 2 4 Motor Connections 2 10 2 2 4 1 Motor Connector Pinout 2 10 2 2 4 2 System Electrical Configuration 2 11 2 2 5 Motor Run In 2 12 3 SPECIFICATIONS 3 1 3 1 General 3 1 3 2 Specification Parameters 3 3 3 2 1 Performance 3 3 3 2 2 Electrical 3 3 3 2 3 Environmental 3 3 3 2 4 Physical Dimensions 3 3 3 2 5 Performance Envelope ...

Page 7: ...e operation of the motor and driver resembles that of a DC motor driven by a voltage amplifier The specifications described in this chapter apply only to the motor driven by the AC 1 Driver Card and the AB 1 driver box Minor differences may result if NCD Controller Driver DC 12 Driver Card or DB 121 122 Driver Box are used 1 2 Vacuum Motors Applications of the Nanomotion motors for vacuum and high...

Page 8: ... Controller with a servo rate of 10KHz or more You may consult Nanomotion for the recommended controller The option for NCD Driver Controller Box consists of a driver and an integrated controller 1 4 Handling CAUTIONS Do not set power on unless the motor is mounted and preloaded Do not immerse the motor in any solvent or cleaning agent Use only a clean cloth to wipe the motor Be sure that the moto...

Page 9: ...ese driving plates have been specifically designed to work with Nanomotion motors Substituting this plate with any other material might reduce motor performance or damage the motor NOTE The instructions given in this section refer to the standard ceramic driving plates provided by Nanomotion Nanomotion can not guarantee performance attained by plates purchased from other sources ...

Page 10: ... base and the method used for mounting should be designed for maximum mechanical rigidity and stiffness Stage Base Stage Carriage Mounting Base 4x holes Alumina Driving Plate location Figure 2 1 Motor Mounting Base The mounting base dimensions diagram refers to the front surface of the Ceramic driving plate For driving plate dimensions please refer to the price list The four screws securing the mo...

Page 11: ...ge It must be supported by a solid even backing along all its length in order to avoid breaking when motor is pressed against it The Ceramic driving plate should also be at least 20 mm longer than the stage travel length otherwise the motor finger tips might be damaged If the above requirements are not met limit the stage travel distance using end stops ...

Page 12: ...otor Connecting the motor to its driver 2 2 1 Bonding the Driving Plate to the Stage The Driving Ceramic Plate interfaces between the motor finger tips and the stage and provides the required friction Bond the driving plate to the stage surface interfacing with the motor finger tips according to the instructions given in this section Ceram ic D riving Plate Stage Figure 2 2 Bonding the Ceramic Dri...

Page 13: ...ble with high vacuum applications 3 Referring to the figure below place the plate in position verifying that There is a maximum of 3 5mm between the lower edge of the Ceramic driving plate and the motor mounting surface There is a minimum of 21mm between the upper edge of the Ceramic driving plate and the motor mounting surface 3 5 mm max 21 mm min Mounting Surface Ceramic driving plate Figure 2 3...

Page 14: ...ing ecobond 24 for vacuum applications 3M 2216 epoxy or CIBA GEIGEY Arldite Radite for non vacuum applications NOTE Be sure the epoxy contacts the upper surfaces of the plate and the stage carriage but does not flow over the Ceramic plate front surface 2 cm Ceramic Plate Epoxy Stage Figure 2 4 Securing the Ceramic Driving Plate to the Stage 5 Allow the required time period for curing according to ...

Page 15: ... both of the two preload setting screws counter clockwise until the turn is completed and the slot is in the position illustrated below NOTE the motor is usually supplied with the preload screws already at the preloaded position If so please continue to step 2 Figure 2 5 Non preloaded Position Continued on the following page Preloaded position ...

Page 16: ...r on the mounting base and loosely secure it using four M4 screws and spring washers inserted from the underside of the mounting base Do not tighten yet 3 Gently press the motor against the ceramic driving plate until it just contacts it and tighten the four screws of Step 2 at a torque of 0 5 0 7 Nm Stage Base Motor Mounting Base Ceramic Driving Plate Stage Carriage ...

Page 17: ...arning Be sure to ground the motor to the electrical network ground according to the following instructions before operating the motor 1 Prepare a grounding wire and terminal connection with the following specifications Terminal diameter for an M3 screw Wire diameter minimum 18 AWG Wire length maximum of 2 meter 2 Open the motor ground screw figures 3 5 3 6 and connect the Ground connection prepar...

Page 18: ... damage the motor however it will affect its performance 2 2 4 1 Motor Connector Pinout WARNING Do not remove the cover of the motor or disassemble its connector High voltage inside CAUTION Do not set power on unless the motor is mounted and preloaded The motor driver connection is a standard 9 contacts D type female connector whose pinout is given below Direction 1 Common Direction 2 Screen Motor...

Page 19: ... be preformed by the user WARNING Since there is no cable shielding the HR8 1 U motor case to ground it must be grounded by means of connection to the network ground Please refer to section 2 2 3 in the manual for detailed instructions 2 2 4 2 System Electrical Configuration The Motor is to be operated by one of Nanomotion s drivers Following is the two possible configurations Nanomotion s Driver ...

Page 20: ...ifetime The required run in conditions are as follows velocity 50 mm sec Duty cycle 50 Duration 4 hours When the run in is completed carefully clean the ceramic strip with a Q Tip soaked with IPA without dismounting the motor General remarks 1 The procedure should be repeated if the motor is disconnected and then reinstalled 2 Do not perform run in in a vacuum environment ...

Page 21: ... be modeled as a DC motor with friction driven by a voltage amplifier as illustrated in the following diagram Offset Vin Kf 1 M 1 S Vel Kfv Figure 3 1 Block Diagram of the Motor and Driver Where Vin Command to the driver 10 to 10 V Kf Force constant N V Offset Starting voltage V Kfv Velocity damping factor similar to back EMF N x sec m Vel Motor velocity m Sec M Moving mass kg S Laplace variable 1...

Page 22: ...hown below A command voltage of 10V is applied to the driver The driver then generates a 39 6Khz sine wave V motor whose amplitude is a function of command voltage The sine wave drives the HR8 motor Figure 3 2 Block Diagram of a typical HR8 Driver Motor Sub system Driver V Motor Velocity Force V Command HR8 Motor ...

Page 23: ...al Lifetime 20 000 hours under nominal operating conditions 3 2 2 Electrical Maximal Voltage 270Vrms 39 6KHz sine wave Maximal Current consumption 600 mA rms Maximal Power Consumption 30W 3 2 3 Environmental Ambient Temperature 0 50 C Storage 20 C 70 C Humidity 0 80 non condensing Vacuum level high vacuum motors Vacuum level ultra high vacuum motors 10 7 Torr guaranteed only after baking 10 10 Tor...

Page 24: ...it as a reference and as a guideline for expected motor performance M ot ors vel oci t y VS com m and 0 0 50 0 100 0 150 0 200 0 250 0 300 0 0 1 2 3 4 5 6 7 8 9 10 Com m and V Vel oci t y m m sec Figure 3 3 Motor Velocity vs Command 1 1 The motor operates horizontally at room temperature and low duty cycle 10 It interfaces an Ceramic Strip according to Nanomotion Specifications and a cross roller ...

Page 25: ... 3 4 Performance envelope at various work regimes How to define a performance envelope An example for using the graph and table A vacuum application requires 10N at a velocity of 100mm sec The graph shows that this point of operation corresponds to the curve d The table shows that curve d and a vacuum environment require that a duty cycle of 17 will not be exeeded while maintaining a maximum conti...

Page 26: ...8 0 2 3 2 M4x0 7 10 7 0 2 9 0 2 4 FINGER TIPS 3 05 PRELOAD RELEASE ECCENTRICS 1 PRELOAD RELEASE ECCENTRICS SHOULD REMAIN ACCESABLE AFTER MOUNTING 2 ALL DIMENSIONS REFER TO A MOTOR CORRECTLY MOUNTED AGAINST ALUMINA STRIP 3 ALL DIMENSIONS ARE IN MM 4 GENERAL TOLERANCE 0 1 41 9 FOR HIGH VACUUM MOTOR 40 5 FOR HIGH VACUUM MOTOR 41 3 FOR HIGH VACUUM MOTOR TYPx4 TYPx4 TYPx2 TYPx2 TYPx2 TYPx2 41 1 FRONT C...

Page 27: ...LEASE ECCENTRICS FINGER TIPS 3 05 copy of layout drawing SP8U M10 L00 30 DIRECTION OF MOTIOIN TYPx4 TYPx8 TYPx2 TYPx2 TYPx2 4 THREADS FOR MOUNTING TYPx2 TYPx2 TYPx2 41 3 FRONT COVER FORWARD NOTES 1 PRELOAD RELEASE ECCENTRICS SHOULD REMAIN ACCESIBLE AFTER MOUNTING 2 ALL DIMENSIONS REFER TO A MOTOR CORRECTLY MOUNTED AGAINST ALUMINA STRIP 3 ALL DIMENSIONS ARE IN MM 4 GENERAL TOLERANCE 0 1 0 6 0 2 FRO...

Page 28: ...Motor User Manual 3 8 3 3 3 Mounting Base Dimensions MOTOR MOUNTING SURFACE SHOULD BE FIXED TO STAGE BASE TYPx2 TYPx2 STAGE CARRIAGE PLATE A TYPx2 TYPx4 40 6 0 1 2 75 REF 25 8 0 1 10 7 0 1 φ5 0 2 0 1 CERAMIC Figure 3 7 Base Layout ...