— 4-7 —
4.2.2.2. Functional Specifications
u
Position control
l
Maximum input pulse frequency : 800 kpps
l
Input pulse format is selected by a parameter.
l
PLS & MNSP
l
Pulse and direction
l
øA and øB quadrature pulse
u
Resolver resolution
Table 4-7
[µm]
Resolver resolution
Motor type
Automatic resolution
setting or set to 12 bit
Set to 10-bit
Y type Megathrust motor
1
4
l
Automatic resolution setting, 10bit and 10 bit setting may be selected by a parameter.
u
Maximum speed
Table 4-8
[mm/s]
Resolver resolution
Motor type
Set to 12-bit
Automatic resolution
setting or set to 10 bit
Y type Megathrust motor
600
1800
l
Automatic resolution setting, 12bit and 10 bit setting may be selected by a parameter.
u
Position feed back signal øA, øB, øZ (MSB)
l
Output signal format: Line driver
Table 4-9: Resolution
[µm]
øA
øB
Resolver resolution
Motor type
Set to 12-bit
Set to 10-bit
øZ (MSB)
Y type Megathrust motor
4
16
4096
l
12bit and 10 bit maybe selected by parameter.
u
Control I/O signal
l
Input signal : Emergency stop, Servo-on, Home position limit switch, Run move, Program
channel switching (64 channel), Over travel limit, Home return start, Clear, Jog and Jog
direction.
l
Output signal : Driver ready, In-position and Home return complete
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