Ver.1.4
July. 3, 2009
OLYMPUS CORPORATION
The apex of the tetrahedral tip becomes sharper due to an oxide sharpening process. The
tip angle around a few hundreds nano meter down from the apex, is about 15 to 25
degrees (see below).
- 5e -
- 6e -
4
Tip shape of Tetrahedral tip
5
Information
Please contact following if you have any question on this user’s manual.
OLYMPUS CORPORATION
Microtechnology R&D Division
2-3 Kuboyama-cho Hachioji-shi Tokyo 192-8512 Japan
email : probe@olympus.co.jp
Please access to the web page of OLYMPUS micro cantilevers.
http://www.olympus.co.jp/probe
As can be seen in the left illustration, a
tetrahedral tip is located at the exact end of
the cantilever.
The finite tip shape will determine the scan
line profile as in the illustrations below.
The tip profile is symmetric with a half tip
angle of 18 degrees macroscopically (see left
below).
The side tip profile is asymmetric with a tip
angle of 35 degrees. Then the cantilever chip
is attached to a chip holder in your AFM with
an angle, about 10 degrees, the asymmetry is
improved (see right below).
Tip shape and scan line profile
