84
Stage
Item
Specifications
STM7-CS50
STM7-CS100
STM7-CS200
STM7-CS300
Stage top size
Ø140 mm
210x210 mm
360x360 mm
510x510 mm
Stage glass size
Ø100 mm
144x144 mm
249x249 mm
349x349 mm
Measuring range
X50mm, Y50 mm
X100 mm, Y100 mm
X200 mm, Y200 mm
X300 mm, Y300 mm
Rotation mechanism
360 °
Measurement accuracy
(L: measuring length)
(3+L/50) μm
(3+2L/100) μm
(3+4L/200) μm
(3+6L/300) μm
Accuracy assurance
weight
5 kg
6 kg
10 kg
15 kg
Dimensions (between
center positions of axes)
427(W)x377(D)x101.5(H)
mm
427(W)x377(D)x87(H)
mm
606(W)x522(D)x108(H)
mm
805(W)x755(D)x108(H)
mm
Weight
18.1 kg
17.7 kg
59.8 kg
111.3 kg
·
Avoid subjecting the stage to excessively unbalanced load although the applied weight is within the accuracy
assurance weight for it may impair the accuracy.
·
Do not place the object heavier than the weight described in Certificate of Accuracy on the stage. The product
may be damaged.
} For the mounting position and size of a tap to clamp a jig on the table, consult your dealer.
Rotatable stage
Item
Specifications
STM7-RS100
STM7-RS200
STM7-RS300
Attachable stage
STM7-CS100
STM7-CS200
STM7-CS300
Rotation range
360 °
Stage top size
Ø130
Ø230
Ø330
Metal surface size
Ø165 mm
Ø270 mm
Ø370 mm
Accuracy assurance
weight
2 kg
5 kg
7 kg
Dimensions
210(W)x210(D)x30(H) mm
350(W)x300(D)x30(H) mm
440(W)x440(D)x30(H) mm
Weight
2.2 kg
4.4 kg
7.3 kg
CAUTION