8. Details of [Analyze] Menu
PV6253-F4E016
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8. Details of [Analyze] Menu
8.1. [Film thickness setting] menu
Under this menu, the
[Film thickness setting]
window is displayed, and various types of
parameters for monolayer film thickness measurements are set up.
8.1.1. [Measurement] tab
Basic parameters for a film thickness measurement are set up. Film thickness is calculated
detecting the wavelengths of the peaks or valleys of spectral reflectance data. It is required
that the wavelengths of two or more peaks or valleys be covered within the measurement
wavelength range (400 to 780 [nm]) for each type.
[Measurement][Enable film thickness measurement]
Checking this option enables the thickness measurement of a monolayer film. The Main
Window displays the
[Thickness]
button and the film thickness panel.
[Type]
Specify the detection method for peak or valley wavelengths at which to measure the film
thickness. The detection method can be chosen from the following three types:
[Type A]
This method calculates a film thickness from the wavelengths of two adjacent peaks or
valleys sought for from the long wavelength side.
Summary of Contents for USPM-RUIII Series
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Page 89: ...10 Help Menu PV6253 F4E016 47 10 Help Menu 10 1 Version menu Displays the version...
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