10
Table III
High Flow
Mass Flow Controller*
4.2
Flow Capacities
Table I
Low Flow
Mass Flow Controller*
Table II
Medium Flow
Mass Flow Controller*
*
Flow rates are stated for Nitrogen at STP conditions [i.e. 70
F
F (21.1
F
C) at 1 atm].
For other gases use the K factor as a multiplier from APPENDIX 2.
CODE
mL/min [N
2
]
CODE
liters/min [N
2
]
02
0 to 10
14
0 to 1
04
0 to 20
16
0 to 2
06
0 to 50
18
0 to 5
08
0 to 100
20
0 to 10
10
0 to 200
12
0 to 500
4.1
CE Compliance
FMA 5400A/5500A Mass Flow Controllers are in compliance with CE test stan-
dards stated below:
EMC Compliance with 89/336/EEC as amended; Emission Standard: EN
55011:1991, Group 1, Class B Immunity Standard: EN 55082-1:1992.
CODE
liters/min [N
2
]
23
15
24
20
26
30
27
40
28
50
CODE
liters/min [N
2
]
40
60
41
80
42
100
43
200
44
500
45
1000
upper block element and may be tilted over 90 degrees for optimal viewing comfort.
Remote or panel mounting remote reading is optional. Standard readings are in direct engi-
neering units for the given gas and flow rate (i.e. liters/minute [slpm], standard cubic cen-
timeters/minute [sccm], standard cubic feet/hour [scfh], etc.). 0 to 100% LCD calibration
scaling is available upon request at time of order. Contact OMEGA
®
when non-standard dis-
play settings are desired.
TRANSDUCER INTERFACE CABLE:
Optional shielded cable is available mating to the FMA
5400A/5500A transducer 15-pin “D” connector.
