TABLE OF CONTENTS
1. UNPACKING THE FMA 5400A/5500A MASS FLOW CONTROLLER......
1.1 Inspect Package for External Damage..............................................
1.2 Unpack the Mass Flow Controller.......................................................
1.3 Returning Merchandise for Repair.....................................................
2. INSTALLATION....................................................................
2.1 Primary Gas Connections.................................................................
2.2 Electrical Connections......................................................................
2.2.1
Valve Control Configuration............................................
2.2.2
Remote LCD Readouts...................................................
2.2.3
Panel Mounting Readouts..............................................
3. PRINCIPLE OF OPERATION....................................................
4. SPECIFICATIONS..................................................................
4.1 CE Compliance................................................................................
4.2 Flow Capacities................................................................................
5. OPERATING INSTRUCTIONS...................................................
5.1 Preparation and Warm Up................................................................
5.2 Flow Signal Output Readings..............................................................
5.3 Swamping Condition...........................................................................
5.4 Setpoint Reference Signal..................................................................
5.5 Valve OFF Control (Open Collector NPN Compatible)..........................
5.6 Valve Test/Purge.................................................................................
6. MAINTENANCE....................................................................
6.1 Introduction........................................................................................
6.2 Flow Path Cleaning..............................................................................
6.2.1
Cleaning the Inlet Filter Screen in FMA Models.................
6.2.2
Valve Maintenance for FMA 5400A/5500A
Series Max. Flow 10, 50 and 100 L/min............................
7. CALIBRATION PROCEDURES....................................................
7.1 Flow Calibration...................................................................................
7.2 Calibration of FMA 5400A/5500A Series Max. Flow 10, 50
and 100 L/min..................................................................................
7.2.1
Connections and Initial Warm Up...................................
7.2.2
Zero Adjustment.............................................................
7.2.3
SPAN Adjustment...........................................................
7.2.4
Linearity Adjustment......................................................
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