R
Silicon Wafer Mapping Sensor
F3M-S825-1
Allows Simultaneous Mapping of Up
to 25 Silicon Wafers
H
Economical—one sensor detects most
wafer types
H
200 mm wafer size
H
Automatic and remote teaching
capability
H
Self-diagnostic functions reduce
downtime
Ordering Information
Applicable wafer size
Number of cassette slots
Function
Remarks
Part number
8 inches (6.35-mm pitch)
25
Self-diagnosis
CE marking
F3M-S825-1
Application Examples
Detects Transparent Glass Wafers
With a Transparency of 92%
The F3M-S825-1 allows the mapping of cassettes that have both
silicon wafers and glass wafers.
Automatic Teaching Saves Setting Time
(Remote Teaching Available)
The F3M-S825-1 has an automatic teaching function that ensures
easy adjustments in minimal time. The remote teaching function
allows quick, on-the-fly set up.
Answer-back Alarms for Setting Errors and
Self-diagnostic Alarms for Operation Errors
These alarms help reduce system downtime and shorten
troubleshooting time.
Static Electricity Protection
OMRON’s optical system (including emitter and receiver)
prevents malfunction and damage—protecting the Sensor from
static electricity if charged on the semiconductor wafers at the
time of mapping.
