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Advanced Industrial Automation

» S u b - m i c r o n l a s e r m e a s u r e m e n t

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E a sy to u s e, i n te g ra te a n d o p e ra te

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Superb scalability

ZS FAMILY SERIES

T h e s c a l a b l e m e a s u r e m e n t s e n s o r f o r a l l s u r f a c e s

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Summary of Contents for ZS

Page 1: ...Advanced Industrial Automation Su b micron laser meas urement Easy to use integrate and operate Superb scalability ZS FAMILY SERIES The scala b le mea surement sensor for al l s urfaces ...

Page 2: ...ond and virtually any texture The ZS L series comes with a sensor controller a data storage unit and a multi controller that coordinates up to 9 units It enables accurate measurement of material thickness evenness and warpage Enhanced flexibility through smart scalability Sensor heads ZS LD CMOS technology packed into an ultra compact sensor head Wide choice of sensor head from 20 mm to 350 mm sen...

Page 3: ...complex measurements tasks Coordinates data between up to nine controllers Fast calculation of measurements such as Thickness Evenness Warpage 4 different tasks Free math ZS LDC sensor controller Ensures you always have the best measurement performance Supports a wide range of sensor heads from short range 20 mm to long range 350 mm High accuracy 0 4 μm Fast response time 110 μs USB and RS 232 por...

Page 4: ...ght in high speed mode gain settings 0 to 5 can be used to compensate To achieve stable sensing of PCBs resins black rubber and other light penetrating objects all you need to do is select the surface type ZS LD50 LD80 Stable measurements for PCBs black resin and metal Smart set up for different surfaces Direct measurement of PCB surface profile structure Reflection signal quality is traced during...

Page 5: ...wafer glass and other measurements requiring precision An unprecedented stationary measurement precision of 0 01 μm the highest in this product class Enables stable measurement of height and undulations in transparent coated glass on worktables Menus let you easily set the measurement conditions for a wide range of glass to achieve stable measurements Outstanding measurement stability and high spe...

Page 6: ... keys correspond to displayed menu items and measurement conditions and other settings can be made intuitively You can also easily switch the display language Communication with the operator is better than ever before Connect directly to a PC A USB 2 0 and RS 232C connection are provided as standard LVDS a new generation high speed communications interface is used between the sensor head and contr...

Page 7: ...ollers in split milliseconds Measurement Tools Height measurement Step and gap measurement X Y Thickness measurement K A B Flatness measurement Max Min Average measurement Eccentricity measurement Peak to Peak Warpage Evenness K mX nY Multi point measurement flatness of resins or metals ZS MDC The support software makes settings easy Sensor Heads Multi controller SmartMonitor PC based user softwar...

Page 8: ...roller When simultaneous measurement of distance to glass glass thickness gap etc is required in glass measurement applications Setting example Task 1 Average Task 2 Thickness For simultaneous measurement of HDD surface deflection and distance to HDD surface Setting example Task 1 Average Average hold Task 2 Average Point to point hold For detection of small recesses and protrusions in measurement...

Page 9: ...onnection Cable ZS XC02D Controller ZS HLDC Digital Equalizer ZS XEQ Flexible Long distance Extension Cable ZS XC15CR XC25CR Digital Equalizer ZS XEQ SENSOR HEAD ZS HLDS 1 The ZX HLDC can be connected to a ZS HLD LD series Sensor 2 Head 2 The ZX LDC can be connected to a ZS LD series Sensor Head ZS series Long distance Extension Cable ZS LD Series ZS HLDC ZS LDC 1 2 to the most powerful sensing ap...

Page 10: ...taneously Data logging intervals as short as 2 ms for precise monitoring at critical transients Export to Excel files Comprehensive macros using filters slope compensation filter median transitions differentiation integration math functions and more ZS SW11E The SmartMonitor PC tool that puts you in full control Connect directly to a computer using USB ...

Page 11: ...more Display 800 x 600 high colour 16 bit or higher recommended 1024 x 768 true colour 32 bit or higher If the recommended specifications are not used data may be broken in the middle or waveforms may not be displayed properly for logging high speed graphs and multi channel waveforms SmartAnalyzer Macro Edition This is a Microsoft Excel macro program Microsoft Excel 2000 or higher is required Anal...

Page 12: ...entricity Warpage Evenness ZSH Multitasking capability manages up to 4 measurement tools in one controller Ordering information Sensor heads ZS L series Sensor Heads ZS HL series Sensor Heads ZS HL series Sensor Heads For Nozzle Gaps also compatible with ZS L controller Optical system Sensing distance Beam shape Beam diameter Resolution 1 1 No of samples to average 128 when set to High precision M...

Page 13: ...is the peak to peak displacement conversion value in the displacement output at the measuring center distance in high precision mode when the number of samples to average is set to 128 and the measuring mode is set to the high resolution mode The standard workpiece is white aluminum ceramics and glass in the regular reflection mode 0 25 µm 0 25 µm 0 4 µm 0 25 µm 0 25 µm Temperature characteristic ...

Page 14: ...descent light Illumination on re ceived light surface 2000 lx or less incandescent light Illumination on received light surface 3000 lx or less incandescent light Ambient temperature Operating 0 to 50 C Storage 15 to 60 C with no icing or condensation Ambient humidity Operating and storage 35 to 85 with no condensation Degree of protection Cable length 0 5 m IP66 cable length 2 m IP67 Materials Ca...

Page 15: ...olution terminal block output 1 Sensing Mode gain measurement object head installation Measurement point 2 Average peak bottom thickness step and calculations Filter Smooth average and differentiation Outputs Scaling various hold values and zero reset I O settings Linear focus correction judgments hysteresis and timer non measurement and bank switching and clear 2 System Save initialization measur...

Page 16: ...nel indicators Electromechanical relays Monitoring products Solid state relays Limit switches Pushbutton switches Low voltage switch gear Sensing Safety Photoelectric sensors Inductive sensors Capacitive pressure sensors Cable connectors Displacement width measuring sensors Vision systems Safety networks Safety sensors Safety units relay units Safety door guard lock switches Authorised Distributor...

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