Timing Charts
144
ZX2 User’s Manual
INTRODUCTION
MAIN
APPLICATIONS
& SETTING
METHODS
SPECIFI-
CATIONS
INDEX
SETTING
TRANSITION
CHARTS
DETAILED
SETTINGS
FLOW OF
OPERATION
CONTENTS
PREPARATION
FOR
MEASUREMENT
BASIC
SETUP
TROUBLE-
SHOOTING
Height
Double
Sheet
Detection
Positioning
Eccentricity
and Surface
Deflection
Steps
and
Warpage
Thickness
Timing Charts
This section explains the timing charts for the I/O signals that are exchanged between the
Controller and external devices.
Laser OFF input
(*) The value is within 150 ms when mutual interference prevention is set to ON.
Reset input
(*1) The value is within 150 ms when mutual interference prevention is set to ON.
(*2) When connecting two or more Amplifier Units, acquire the measurement results after the response time
specified for connecting two or more units elapses.
(See page 86.)
Note. • When the hold function is not used
The output while a reset signal is being input is held in accordance with the output during non-
measurement setting.
• When the hold function is used
If a reset signal is input, the state in effect before the hold function was set will be restored.
(For details on the hold function, see page 93, and for details on the output during
non-measurement, see page 111.)
1
Laser emission
ON
→
OFF
If laser OFF input is ON for 4 ms or more, the signal is received, and
laser emission is turned OFF within 8 ms.
2
Laser emission
OFF
→
ON
If laser OFF input is OFF for 4 ms or more, the signal is received, and
laser emission is turned ON within 20 ms.
1
Output value
reset execution
If reset input is ON for 4 ms or more, the signal is received, and output
is reset within 4 ms.
2
Output value
reset
cancellation
If reset input is OFF for 4 ms or more, measurement is resumed.
Acquire the measurement results after the preset response time
elapses. (*2)
OFF
ON
OFF
ON
4 ms
Within
8 ms (*)
4 ms
Within
20 ms (*)
Laser emission
ON
OFF
Laser emission
OFF
ON
Laser OFF input
Laser emission
or more
or more
Effective reset period
OFF
ON
4 ms
Within
4 ms (*1)
4 ms
Output value
reset execution
Output value
reset cancellation
Reset input
or more
or more