Page 1-67
REGULAR
MAINTENANCE
1
444C-E-MMA01-A08-02
Check Every 560 Hours (Once a Month)
17.
Raise the nozzle which has been
measured.
∗
Press
UNLOCK
+ for pos 1.
18.
Turn OFF the vacuum for the nozzle
position which has been measured.
∗
Press
UNLOCK
+ for pos 1.
Measure the nozzle at other position.
(Here we describe position 2 as an example.)
19.
Turn ON the nozzle position to be
measured.
∗
Press
UNLOCK
+ for pos 2.
20.
Lower the nozzle at the position to be
measured.
∗
Press
UNLOCK
+ for pos 2.
After it, repeat steps 10 to 20, and check the vacuum pressure at all nozzle positions.
Vacuum
OFF
Vacuum
ON
Nzl Extend
ON
2
1
1
2
Nzl Extend
OFF