404/406XR Series Product Manual
Appendix C
– Clean Room
44
Parker Hannifin Corporation
1140 Sandy Hill Road
Irwin, PA 15642
www.parkermotion.com
Appendix C - Clean Room
Class 100 Clean Room Prepared Tables can be ordered as options to standard product. Parker
Hannifin Corporation requires that these preparations be completed at the factory. These units should
be handled carefully to minimize possible contamination.
The most obvious visual difference to these units is the absence of the customary stainless steel strip
seals. Other non-critical components have also been eliminated to reduce the particulate generation.
Through the use of special greases, elimination of bearing shields, and similar activities, particle
generation of critical components has been minimized.
The actual measurement of particulate generation is taken at specific locations relative to the positioner,
in a controlled environment.
Parker Hannifin Corporation has developed standard options for precision positioning tables
prepped for cleanroom applications. Testing was conducted by an independent facility
specializing in clean air certification to determine the level of cleanroom compatibility of the
Parker Hannifin Corporation 404XR and 406XR series tables. The particle size and population
classification defined in Federal Standard 209E was used to establish realistic limitations of
standard equipment used within a cleanroom or cleanzone. Tests were performed with the
tables in several orientations to approximate most applications.
Test Environment:
Class II Type A Biological Safety Cabinet, Class 1
Laser Particle Counter
1 CFM Laminar Flow
Sample Size of 10 CF
Table Set Up :
Parker Hannifin Corporation 404/406XR series table with "R2" Option
100mm moves @ 75mm/sec
100% Duty Cycle
Test 1:
Horizontal Plane
Particle counter located above table surface
Class 10 Compatible
50mm
Air Flow
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