MX80L Series Product Manual
Chapter 2 – MX80L Series Table Specifications
Parker Hannifin Corporation
Daedal Division
Irwin, Pennsylvania
15
Test Methodology
Published accuracy and repeatability specifications are subject to the testing methodology. Daedal’s
methodology provides specifications over the entire table travel regardless of start or finish position. The
accuracy and repeatability specifications are based on the peak to peak error measured by a laser
interferometer and prism located at 38mm above the center of the table. This type of measurement sums
the X, Y, Z, roll, pitch, and yaw errors. Temperature deviations from test condition may cause deviations
in straightness, flatness, accuracy, and repeatability from catalog specifications. Tests are performed with
the table mounted to a granite table, unloaded at 20
o
C.
In this example, the accuracy of an MX80L-T02 ranges from -3.68 microns to 2.64 microns. This table
would have its accuracy specified as 6.32 micron since the worst case would be starting at one extreme
and traveling to the other.
2.64
-3.68
6.32
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