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    Page 10                                          Instruction manual Parker X-Flow                                         FM-1407 Rev - 11/2021 

 

 

2

  Installation Instructions

 

This section discusses how to prepare the system and install a X-Flow™ mass flow controller. 

2.1  Unpacking and inspection 

Check the outside packing box for damage incurred during shipment. Should the packing box be 

damaged, then the local carrier must be notified at once regarding his liability, if so required. At the same 

time a report should be submitted to your Parker representative. 

 

Carefully remove the equipment from the packing box. Verify that the equipment was not damaged 

during shipment. Should the equipment be damaged, then the local carrier must be notified at once 

regarding his liability, if so required. At the same time a report should be submitted to your Parker 

representative. 

 

Contact your local Parker representative or ppfinfo@parker.com for return information.  

 

 

 

Before installing an X-Flow™, it is important to read the attached label and check: 

- Flow rate 

- Fluid to be measured 

- Up- and downstream pressures 

- Input/output signal (determined by the model code) 

- Temperature 

 

Inspect the X-Flow™ mass flow controller for damaged or missing parts. 

2.2  Rated pressure test inspection 

Each X-Flow™ is pressure tested to at least 1.5 times the working pressure of the process conditions 

stipulated by the customer, with a minimum of 8 bar. 

 

Each instrument is helium leak tested to at least 2

10

-9

 mbar l/s Helium outboard. 

 

 

 

The tested pressure is stated on the flow controller model code sticker. Check test pressure 

before installing in the line.  

If the sticker is 

not

 available or the test pressure is incorrect, the instrument should 

not

 be 

mounted in the process line and must be returned to the factory.  

2.3  Instrument mounting 

The bottom side of an X-Flow™ consists of four mounting holes for stable mechanical fixation of the 

instrument. Two opposing mountings are suggested, one on the inlet and one on the outlet side of the 

instrument.  Refer to the following documents for exact position of the mounting holes: 

 

Dimensional drawing 601XF, document A-4539 and Transition Plate dimensional drawing A-4540

    

 

The preferred mounting position of X-Flow™ mass flow controllers is horizontal. Other mounting 

positions may introduce a zero shift and/or little gas and pressure dependency of the zero signal. When 

mounting an instrument other than horizontal, zeroing of the instrument is advised. The zeroing 

procedure is described in section 2.12. 

 

 

 

Avoid installation near mechanical vibration and/or heat sources.  

2.4  Fluidic connections 

The inlet and outlet cavities/fluid connection ports of X-Flow™ instruments have 9/16-18 UNF-2B 

(female) threads. 

 

The instrument is shipped standard without fittings. 

 

Summary of Contents for X-Flow FM-1407

Page 1: ...11 FM 1407...

Page 2: ...injury and or damage to the equipment Even though care has been taken in the preparation and publication of the contents of this manual we do not assume legal or other liability for any inaccuracy mis...

Page 3: ...urging 12 2 11 Zeroing 13 3 Basic Operation 14 3 1 General 14 3 2 Analog operation 14 3 3 Digital communication protocol detection Flow BUS RS232 or MODBUS RS485 15 3 4 Basic RS232 Flowbus operation 1...

Page 4: ...ng a constant flow rate 1 3 Symbols Important information Discarding this information could cause injuries to people or damage to the Instrument or installation Helpful information This information wi...

Page 5: ...mal mass flow sensor a laminar flow element which acts as a bypass a solenoid proportional control valve and a digital electronic PC board for PID control and communication There is one model 601XF fo...

Page 6: ...ity to ensure compatibility there is no liability for damages accruing from the use of this manual or other sources regarding compatibility Compatibility of seals with gasses can impact reliability of...

Page 7: ...rmal conditions 1 calibration fluid N2 2 customer fluid Contact the factory for more information 1 5 5 Features Each instrument consists of an Analog interface a digital RS 232 interface and a digital...

Page 8: ...s the delta T sensed by the upstream and downstream temperature sensors on the capillary The transfer function between gas mass flow and signal can be described by the equation m p signal c K V Vsigna...

Page 9: ...ts Units may be flushed with clean dry inert gas In case of severe contamination it may be required to clean the inside of the instrument After cleaning a recalibration is required Contact ppfinfo par...

Page 10: ...ing pressure of the process conditions stipulated by the customer with a minimum of 8 bar Each instrument is helium leak tested to at least 2 10 9 mbar l s Helium outboard The tested pressure is state...

Page 11: ...ed It is recommended to install an in line filter or liquid separator upstream of the flow controller and if backflow can occur a downstream filter is recommended too Be aware of the pressure drop cau...

Page 12: ...been made according to the hook up diagram It is recommended to turn on power before applying pressure on the instrument and to switch off power after removing pressure Check fluid connections and mak...

Page 13: ...ing by means of using the micro switch button on top of unit is described in this manual Warm up pressurize the system and fill the instrument according to the process conditions Make sure no flow is...

Page 14: ...l mode indicates to which setpoint source the controller should respond 3 2 Analog operation In analog operation following signals are available Measured value analog output Setpoint analog input The...

Page 15: ...ocol The protocol is detected The instrument will remember the detected protocol while the instrument is powered on 3 4 Basic RS232 Flowbus operation RS232 Flowbus communication can be used for operat...

Page 16: ...ns are available from the factory A special RS232 cable 7 03 366 can be ordered separately It consists of a T part with 1 male and 1 female sub D 9 connector on one instrument side and a normal female...

Page 17: ...be done in the following ways Using RS232 FlowDDE Off line via the RS232 communication port by means of FlowDDE This program can be used to read change parameters including the slave address baud rate...

Page 18: ...both LEDs will flash The flashes are called count flashes and have a pattern of 0 5 seconds on 0 5 seconds off Table LED indications for bus address and baud rate Read bus address and baud rate In run...

Page 19: ...0 1 sec off count flashes start when switch is pressed 0 5 sec on 0 5 sec off time out 60 sec Press switch and count red and green flashes for baud rate setting Release after desired count Counts to...

Page 20: ...00 baud and 400 bytes at 38400 baud When this size is exceeded corrupted responses may be received Write Single Register 06 Possible exception responses 02 ILLEGAL DATA ADDRESS in case of writing to n...

Page 21: ...ion responses 04 SLAVE DEVICE FAILURE in case of an internal error 3 5 5 Available parameters Modbus registers in the data model are numbered from 1 to 65536 In a Modbus PDU Protocol Data Unit these r...

Page 22: ...59 0xF259 0xF25A 62041 62042 PID Kp Float RW 0xF2A8 0xF2A9 0xF2A9 0xF2AA 62121 62122 PID Ti Float RW 0xF2B0 0xF2B1 0xF2B1 0xF2B2 62129 62130 PID Td Float RW 0xF2B8 0xF2B9 0xF2B9 0xF2BA 62137 62138 Ksp...

Page 23: ...off At next power up instrument will be active again LED indications using micro switch button at normal running mode of an instrument Power up menu press switch and hold for indicated time and LED i...

Page 24: ...tart when switch is pressed 0 5 sec on 0 5 sec off Counts to max 2 and then starts at 0 again When counting fails keep switch pressed and restart counting for next attempt 2 Set units of setpoint cont...

Page 25: ...pe Unsigned char 1 byte character Unsigned char x x byte array string Unsigned int 2 byte unsigned integer Float 4 byte floating point Access R The parameter is read only RW The parameter can be read...

Page 26: ...e particular time frame of a protocol then it will immediately switch to this protocol for 660 mS If a valid message is received the instrument will answer reply to this message and stay in the detect...

Page 27: ...een 0 and 100 Control Mode Type Access Range FlowDDE Flowbus Modbus Unsigned int RW 0 18 12 1 4 0x0024 37 The Controller mode is used to select different functions of the instrument The following mode...

Page 28: ...1 2 Identification Serial number Type Access Range FlowDDE Flowbus Modbus Unsigned char 20 R 92 113 3 0xF118 0xF11F 61721 61728 This parameter consists of a maximum 20 byte string with instrument ser...

Page 29: ...ty zero point offset for direct reading in sensor base units 4 1 4 Auto Zeroing To start the auto zero procedure two parameters should be written Control Mode Type Access Range FlowDDE Flowbus Modbus...

Page 30: ...Range FlowDDE Flowbus Modbus PDU Float RW 0 1E 10 168 114 22 0xF2B0 0xF2B1 62129 62130 Integration action in seconds of the PID controller The value should not be changed Td PIDTd Type Access Range Fl...

Page 31: ...n reset the instrument will return to its default control mode The default control mode can be changed with the following parameter IOStatus Type Access Range FlowDDE Flowbus Modbus PDU Unsigned char...

Page 32: ...bus PDU Unsigned char RW 0 255 86 114 11 0xF258 62041 Bit 3 7 0 is used to disable the micro switch 0 micro switch disabled 1 micro switch enabled Procedure to enable the micro switch Read IOStatus Ad...

Page 33: ...e table below Diameter mm Kv Normally closed p max bard 0 05 0 07 0 10 0 14 0 20 0 30 0 37 0 50 0 70 1 00 1 30 1 50 1 70 2 00 4 33 x 10 5 8 48 x 10 5 1 73 x 10 4 3 39 x 10 4 6 93 x 10 4 1 56 x 10 3 2...

Page 34: ...t valve qualified personnel only Screen in inlet fitting blocked 1f clean screen Sensor capillary failure 1g return to factory Improper Control Mode setpoint source 1h See Section 3 7 Maximum output s...

Page 35: ...le Contact your local Parker Sales office In the US contact the Parker factory or send an email describing the problem to ppfinfo parker com PARKER HANNIFIN CORPORATION INSTRUMENTATION GROUP PRECISION...

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