5.8 Replacement of TC 110 electronic unit of the turbomolecular pump
Disassembly
1. Create an air inlet on the analyzer cell from the menu
[Maintenance] [Maintenance turbo pump
& cell] [Stop and vent]
(see chapter “Maintenance turbo pump & cell” in the operating manual).
2. Power off the leak detector (see chapter “Powering Off”).
3. Remove the cover (see chapter “Cover disassembly/reassembly”).
1
2
2
1
1
The black plug
must
be kept, as it is not provided with the new component.
Reassembly
2
1
1
2
2
0.6-0.8 N·m
5.9 Diaphragm pump replacement
Disassembly
1. Create an air inlet on the analyzer cell from the menu
[Maintenance] [Maintenance turbo pump
& cell] [Stop and vent]
(see chapter “Maintenance turbo pump & cell” in the operating manual).
2. Power off the leak detector (see chapter “Powering Off”).
3. Remove the cover (see chapter “Cover disassembly/reassembly”).
Service - Maintenance
20/30