3 Product description
3.1 Structure
A quadrupole analyzer consists of:
● Ion source
● Mass filter with quadrupole rods
● Ion detector (SEM and deflection unit with Faraday, or only Faraday)
● Housing with flanges
Through high mechanical accuracy and the optimization of the ion-optic unit of ion source and rod sys-
tem, the analyzers achieve a high resolution, high transmission and low mass discrimination. The good
resolution and high mass range are prerequisites for using the devices to solve analytical measuring
problems. The different versions with Faraday cup or with 90° off-axis SEM and Faraday cup, as well as
the wide selection of ion sources, allow optimal adjustment to the respective measuring problem. The
open design and the low outgassing rate of the analyzers, which are designed as immersion systems,
enable exact partial pressure analyses, from high vacuum to extreme ultra-high vacuum (XHV).
1.1
1.2
1.3
1.4
1.5
7
5
6
4
4
3
3
1
2
8
Fig. 1:
QMA with 90° off-axis SEM
1
Ion source (variants)
3
Connection flange
1.1 Axial
4
Faraday cup
1.2 Crossbeam (CB)
5
SEM
1.3 Crossbeam (gas tight)
6
Housing
1.4 Crossbeam (gas tight, with 2 gas supplies)
7
Deflection unit
1.5 Grille
8
QMA with Faraday cup
2
Mass filter
3.2 Ion sources
Ionization is achieved through ion impact. Thermal emission causes electrons to leave a heated wire
and electrical attraction fields focus them toward the ionization area. The ionization process is the most
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