12 Technical data and dimensions
12.1 Technical data
Parameter
Value
Overpressure
Permissible overpressure
≤ 2000 hPa (absolute)
Vacuum
Operating pressure (Faraday)
≤1 × 10
-4
hPa in the ion source
Operating pressure (SEM)
≤1 × 10
-5
hPa in the ion source
Sensitivity
9)
10)
Smallest detectable partial pressure (Faraday)
<10
-11
hPa
Smallest detectable partial pressure (with 90° SEM and electronic
counter)
<10
-15
hPa
Sensitivity for air (Faraday)
>3 × 10
-4
A/hPa
Sensitivity for air (SEM)
>200 A/hPa
Mass filter
QMA 400
Rod diameter
8 mm
Rod length
200 mm
Rod material
Molybdenum
QMA 410
Rod diameter
16 mm
Rod length
300 mm
Rod material
Molybdenum
QMA 430
Rod diameter
8 mm
Rod length
200 mm
Rod material
Stainless steel
SEV 217
Amplification (new)
>10
8
at 3.5 kV
Operating voltage
1 – 3.5 kV
Bias voltage
≤±3,2 kV at SEM-
Number of stages
17
Voltage divider
18 MΩ
Admissible output current
≤10
-5
A
Bakeout temperature
for dynode material
≤400°C
CuBe
SEV 218
Data as for SEV 217, however, with separate conversion dynode (CD)
CD voltage
≤-6.3 kV
Connection flange
QMA 400
DN 63 CF
QMA 410
DN 100 CF
QMA 430
DN 63 CF
Gas connections (CB ion sources)
9)
Valid for QMA 400 without SEM, CB-IQ with magnet, emission 1 mA, ΔM
10
= 1 u
10) Peak with = 1 u on 10% of the peak height
Technical data and dimensions
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