Pfeiffer Vacuum QMA 4X0, Operating Instructions Manual

Page 1: ...OPERATING INSTRUCTIONS EN Translation of the Original QMA 4X0 Quadrupole Analyzer for QMG 700 HiQuad ...

Page 2: ...fo pfeiffer vacuum de Further operating instructions from Pfeiffer Vacuum can be found in the Download Center on our website Disclaimer of liability These operating instructions describe all models and variants of your product Note that your product may not be equipped with all features described in this document Pfeiffer Vacuum constantly adapts its products to the latest state of the art without...

Page 3: ...nced training with Pfeiffer Vacuum 15 2 9 Operator requirements 15 3 Product description 16 3 1 Structure 16 3 2 Ion sources 16 3 2 1 Axial ion source 17 3 2 2 Crossbeam ion source 18 3 2 3 Grid ion source 19 3 3 Mass filter 21 3 3 1 QMA 430 21 3 3 2 QMA 400 21 3 3 3 QMA 410 21 3 4 Secondary electron multiplier 21 3 4 1 SEV 217 21 3 4 2 Detecting negative ions 22 3 4 3 SEV 218 22 3 5 Overview of t...

Page 4: ...iplier SEM 37 7 7 Surface ions 38 7 8 Using degas function 38 7 9 Determining optimal parameter values 38 7 9 1 Selecting recommended operating modes 39 7 9 2 Optimization with test gas 40 7 9 3 Configuring Emission ion source parameter 40 7 9 4 Configuring Protection Current ion source parameter 40 7 9 5 Configuring V1 Ion Reference ion source parameter 40 7 9 6 Configuring V2 Cathode ion source ...

Page 5: ...12 2 Dimensions 49 EC Declaration of Conformity 51 Table of contents 5 52 ...

Page 6: ...3 Typical values of the axial ion source 18 Tbl 4 Typical values of the crossbeam ion source 19 Tbl 5 Typical values of the grid ion source 21 Tbl 6 Spare parts for QMA 4x0 47 Tbl 7 Technical data 49 Tbl 8 Dimensions 50 Tbl 9 Dimensions of the ion sources 50 List of tables 6 52 ...

Page 7: ... B ion source 27 Fig 10 Installing support plate 27 Fig 11 Analyzer on the assembling trestle 28 Fig 12 Removing transportation protection 29 Fig 13 Removing protective pipe 29 Fig 14 Installing electron collimation magnets 30 Fig 15 Holding vertical seal with knife blade 31 Fig 16 Protective pipe 32 Fig 17 SEM connector plate 33 Fig 18 Connector plates 36 Fig 19 Default parameters of the Ion Sour...

Page 8: ...e documentation A component of the software Declaration of conformity A component of these instructions Tbl 1 Applicable documents You can find these documents in the Pfeiffer Vacuum Download Center 1 1 2 Variants This document applies to products with the following article numbers Article number Designation PT M07 xxx QMA 400 PT M08 xxx QMA 410 PT M09 xxx QMA 430 You can find the part number on t...

Page 9: ...tep 1 2 Step 2 3 1 3 2 Pictographs Pictographs used in the document indicate useful information Note Tip 1 3 3 Stickers on the product This section describes all the stickers on the product along with their meanings D 35614 Asslar Mod P N S N Input QMA 4x0 PT M0x xxx Made in United States 2022 08 Rating plate The rating plate is located on the side of the unit 1 3 4 Abbreviations Abbreviation Expl...

Page 10: ...V Extreme ultra high vacuum YOx Ir Yttriated iridium Tbl 2 Abbreviations used 1 4 Trademark proof HiQuad is a registered trademark of Pfeiffer Vacuum GmbH QUADERA is a registered trademark of Inficon GmbH About this manual 10 52 ...

Page 11: ...Safety instructions Safety instructions according to product life stages All safety instructions in this document are based on the results of a risk assessment Pfeiffer Vacuum has taken into account all the relevant life stages of the product Risks during installation DANGER Danger to life caused by electric voltage on the analyzer During operation dangerous voltage is present on the electrode sys...

Page 12: ...aust gas system is suitable for the gases supplied Consider potential interactions between the materials and process gases When handling the gases used observe the applicable guidelines Observe the protective measures Risks during maintenance WARNING Health hazard through poisoning from toxic contaminated components or devices Toxic process media result in contamination of devices or parts of them...

Page 13: ...s additional equipment Following the installation into a system the operator is required to check and re evalu ate the conformity of the overall system in the context of the relevant European Direc tives before commissioning that system General safety precautions when handling the product Observe all applicable safety and accident prevention regulations Check that all safety measures are observed ...

Page 14: ...lations International national and locally applicable standards and guidelines Additional product related guidelines and regulations 4 Only use original parts or parts approved by Pfeiffer Vacuum 5 Keep the operating instructions available at the place of installation 6 Ensure personnel qualification 2 8 Personnel qualification The work described in this document may only be carried out by persons...

Page 15: ... Advanced training courses Pfeiffer Vacuum offers advanced training courses to maintenance levels 2 and 3 Adequately trained individuals are Maintenance level 1 Customer trained specialist Maintenance level 2 Customer with technical education Pfeiffer Vacuum service technician Maintenance level 3 Customer with Pfeiffer Vacuum service training Pfeiffer Vacuum service technician 2 8 3 Advanced train...

Page 16: ...ion of ion sources allow optimal adjustment to the respective measuring problem The open design and the low outgassing rate of the analyzers which are designed as immersion systems enable exact partial pressure analyses from high vacuum to extreme ultra high vacuum XHV 1 1 1 2 1 3 1 4 1 5 7 5 6 4 4 3 3 1 2 8 Fig 1 QMA with 90 off axis SEM 1 Ion source variants 3 Connection flange 1 1 Axial 4 Farad...

Page 17: ...tion The electrons emitted by the cathode are accelerated toward the grid of the ionization area The Weh nelt electrode which is negative to the cathode focuses the electrons Most of the electrons pass through the grid and reach the lens focus or return to the grid The ions produced by electron impact are drawn out by the focus and entrance orifice and focused to the mass filter The grid prevents ...

Page 18: ...nts Residual gas analysis on vacuum processors e g plasma etching Process monitoring process control e g closed loop control of gas composition or of vaporiza tion sources Molecular beam applications Thanks to their minimal gas consumption low de mixing and low time constant the gas tight versions are particularly suitable for Measuring gases and solvents in fluids Respiration analysis Analysis of...

Page 19: ... 90 V V2 Cathode 70 eV 5 V3 Focus 20 V V4 Field Axis 15 V V5 Extraction 250 V V6 Inner Deflection 300 V Protection Current W YOx Ir 4 2 A 3 5 A Tbl 4 Typical values of the crossbeam ion source 3 2 3 Grid ion source The grid ion source has a very open design has an extremely low outgassing rate and can be de gassed easily It emits only a few surface ions It is always equipped with two tungsten fila...

Page 20: ...desorption of surface ions is reduced Pressure 10 7 hPa Emission 20 mA at 550 V Time 10 15 minutes Degassing recommendations for the grid ion source 1 Perform degassing for 10 15 minutes 2 Wait for the final pressure 3 Check the spectrum 4 Repeat the operation if needed 100 V 0 V1 V2 V4 1 2 3 4 Fig 4 Electrode arrangement and potential curve of the grid ion source 1 Grille 3 Entrance orifice 2 Cat...

Page 21: ...of the filtered ions on the rod surfaces is reduced and thus also the susceptibility to contamination 3 4 Secondary electron multiplier The multiplier consisting of 17 discrete stages with focusing dynode geometry is a fast ion current am plifier that is located between the mass filter and electrometer pre amplifier Thanks to its high amplifica tion the downstream electrometer pre amplifier can be...

Page 22: ...f the HV 702 The post acceleration is therefore independent of the set amplification The high post acceleration significantly reduces the mass discrimination during the conversion Other advantages also occur during ratio measurements e g iso topes with high dynamics HV HV EP CD 6 3kV HV 702 0 3 5kV CD EP 422 Fig 7 SEV 218 3 5 Overview of the variants 3 5 1 Cathode materials Tungsten W is the stand...

Page 23: ...x 300 C 3 5 3 90 deflection The 90 off axis arrangement has a very low signal background because the electrostatic 90 deflection prevents fast or excited neutrals and photons from hitting the SEM 3 5 4 90 deflection with deflection voltage The inner deflection plate is on potential V6 Deflection the outer deflection plate is directly connected to the Faraday cup and electrometer pre amplifier EP1 ...

Page 24: ...Vacuum always keep all of the information on the rating plate to hand 3 7 Scope of delivery QMA analyzer Test log Unpacking the product and checking completeness of the shipment 1 Unpack the product 2 Remove the transport fasteners transport protection etc 3 Store the transport fasteners transport protection etc in a safe place 4 Check that the shipment is complete 5 Ensure that no parts are damag...

Page 25: ...rotections prior to each transport 4 2 Storing the product NOTICE Damage caused by improper storage Improper storage will lead to damage to the product Static charging moisture etc will lead to defects on the electronic components Comply with the instructions for safe storage Packing We recommend storing the product in its original packaging Store product safely Store the product in a cool dry dus...

Page 26: ...result of galvanic connections contact flashover plasma ion or electron beams etc If such danger sources exist in the vacuum chamber you must provide protective measures that safely rule out such influences Even smaller external voltages acting on the analyzer will lead to damage to the electronics and unreliable measuring results Meet appropriate protective measures against external voltages for ...

Page 27: ...supply 5 1 3 Installing support plate Required tools Screwdriver no 6 1 2 Fig 10 Installing support plate 1 Clamping screw on the side 2 Support Procedure 1 Place the analyzer on the edge of the table 2 Use the screwdriver to loosen the clamping screw on the side of the support plate 3 Push the support plate onto the analyzer flange 4 Align the support plate in such a way that you are able to easi...

Page 28: ...ith bare hands increases the desorption rate and leads to in correct measurements Dirt e g dust fingerprints etc and damage impair the function During assembly and maintenance work on high or ultra high vacuum systems always wear clean lint free and powder free laboratory gloves Only use clean tools Make sure that the connection flanges are free of grease Remove protective caps and protective cove...

Page 29: ... it for future use 2 Check the inside for damage and wiring short circuits 5 1 6 Removing protective pipe Prerequisites Device is switched off All cables have been disconnected from the analyzer Required tools Screwdriver 1 2 Fig 13 Removing protective pipe 1 Screw 3 2 Protective pipe Procedure 1 Remove the 3 outer screws 2 Pull off the protective pipe Installation 29 52 ...

Page 30: ...r s transport protection only when necessary Carry out all work in a well lit area NOTICE Incorrect magnet alignment The magnets have been aligned Removing the magnets from their mounting plate destroys the alignment Do not remove the magnets from the mounting plate Pfeiffer delivers the magnetic unit of the crossbeam ion source in separate packaging Prerequisite Operational conditions fulfilled R...

Page 31: ...ired tools Knife box cutter Wrench Required material OFHC copper gasket 1 2 Fig 15 Holding vertical seal with knife blade 1 OFHC copper gasket 2 Holding in place with a knife blade Procedure 1 Insert an OFHC copper gasket into the analyzer or system flange 2 During installation hold the OFHC copper gasket stationary with a knife blade 3 Carefully insert the analyzer into the vacuum system The ion ...

Page 32: ...0x You can find information on how to install HF generator QMH 40x in the corresponding operating in structions for QMH 40x 5 5 Installing EP 422 electrometer pre amplifier on analyzer For information on installing the EP 422 electrometer pre amplifier refer to the QMG 700 HiQuad oper ating instructions 5 6 Removing installing SEM connector plate DANGER Danger to life from electric shock The volta...

Page 33: ...tor plate 8 Unscrew the three studs using a suitable pin 9 Keep all the parts You will need these parts again when switching to electrometer operation Installing SEM connector plate SEM connection 1 Install the three studs using a suitable pin 2 Put on the connector plate 3 Connect the cable lug of the yellow green grounding conductor to the flange 4 Tighten the three hexagon socket screws 1 5 mm ...

Page 34: ...h the supplied test log The test log indicates the optimal values for your analyzer 4 If the saved values do not match use the software to configure them 5 If you do not have the test log any more activate the default setting for your ion source and opti mize it In complete systems Pfeiffer Vacuum factory calibrated the high frequency generator specifi cally for the analyzer Calibrating high frequ...

Page 35: ... second filament After switching wait for thermal stability to be estab lished A large difference in the sensitivity between the two filaments indicate a mechanical deforma tion 10 Determine the best HF cable polarity Setting the crossbeam ion source with magnet For analyses at different pressures Pfeiffer Vacuum recommends removing the magnetic unit or reduc ing the emission to 0 1 mA At low emis...

Page 36: ...nnector plates for bakeout temperatures 200 C Required tools Allen key WAF 1 5 1 Fig 18 Connector plates 1 Screening sleeves Removing connector plates 1 On the 90 version remove the SEM connector plate but leave the three studs in place 2 Remove the protective pipe of the large connector plate 3 Loosen the hexagon socket screw 1 5 mm WAF of the screening sleeve by a turn 4 Push the screening sleev...

Page 37: ...ith the SEM Voltage parameter for the SEM high voltage set the amplification and thus the sensitivity using very large thresholds Avoid both values below 1 kV and ion currents above 1 μA for a longer period several mi nutes because the amplification is not stable in these ranges Avoiding contamination When working with an unfavorable gas composition hydrocarbons and other organic vapors use as low...

Page 38: ...ination of the ion source Optimize the Protection Current filament protection for degas operation If you don t want to use the degas function or if it is impermissible set the Protection Current to 0 A to block degas operation 7 9 Determining optimal parameter values For some applications it is necessary to deviate from the factory setting As the contamination increas es or after overhauls it is r...

Page 39: ...are in the middle of the displayed range The logarithmic 3 decade visualization of the ion current makes it possible to clearly see the resolution the peak shape and peak height Depending on the aim of the optimization a line ar or logarithmic visualization across e g 6 decades can be more advantageous 4 For the optimization first use Detector Type FARADAY and then SEM 5 Set the deflection voltage...

Page 40: ...ection Current set ting is too low Procedure To achieve optimum protection set the switch off threshold as low as possible The setting is optimal if you are just barely able to switch on the emission without triggering the protection circuit filament protection 7 9 5 Configuring V1 Ion Reference ion source parameter Ion Reference is the nominal potential on which the ion source forms the ions The ...

Page 41: ... the lowest voltage value but observe the section applicable for your ion source 3 Also optimize the Extraction parameter if present when changing the Focus 7 9 8 Configuring V4 Field Axis ion source parameter The field axis voltage is the potential difference between the ionization area Ion Reference and the quadrupole mass filter The field axis voltage therefore defines the kinetic energy veloci...

Page 42: ...ectrometer pre amplifier EP1 and is thus on ground potential The opti mum value is determined by the ion formation potential Ion Reference and to a certain extent by the SEM voltage Reference values Ion Reference 120 V 40 V Inner Deflection 300 V 200 V Procedure Adjust the Inner Deflection until the maximum peak height is achieved Optimize the Inner Deflection again whenever you change the SEM Vol...

Page 43: ...arge Pfeiffer Vacuum decontaminates products not clearly declared Free of contamination at your expense Ship product safely Do not ship microbiological explosive or radioactively contaminated products Observe the shipping guidelines for the participating countries and transport companies Highlight any potential dangers on the outside of the packaging Download the explanation for contamination at P...

Page 44: ...dance with the applica ble regulations relating to environmental protection and human health with a view to reducing natural resource wastage and preventing pollution 9 1 General disposal information Pfeiffer Vacuum products contain materials that you must recycle Dispose of our products according to the following Iron Aluminium Copper Synthetic Electronic components Oil and fat solvent free Obser...

Page 45: ...lity You can find more detailed information and addresses on our homepage in the Pfeiffer Vacuum Service section You can obtain advice on the optimal solution for you from your Pfeiffer Vacuum representa tive For fast and smooth service process handling we recommend the following 1 Download the up to date form templates Explanations of service requests Service requests Contamination declaration a ...

Page 46: ...oduct in suitable stable transport containers only e Maintain applicable transport conditions ERKLÄRUNG KONTAMINIERUNG 6 Attach the contamination declaration to the outside of the packag ing 7 Now send your product to your local Service Center 8 You will receive an acknowledgment quotation from Pfeiffer Vac uum Our sales and delivery conditions and repair and maintenance conditions for vacuum devi...

Page 47: ...T Cross beam ion source with iridium filament Y2O3 coated PT 449 025 T Cross beam ion source gas tight with tungsten filament BN846529 T Cross beam ion source gas tight with iridium filament Y2O3 coated On request Grid ion source with tungsten filament BN845097 T Filaments Tungsten filaments set of 5 pieces for axial ion source BN845024 T Iridium filament Y2O3 coated for axial ion source 1 piece B...

Page 48: ...Rod material Molybdenum QMA 410 Rod diameter 16 mm Rod length 300 mm Rod material Molybdenum QMA 430 Rod diameter 8 mm Rod length 200 mm Rod material Stainless steel SEV 217 Amplification new 108 at 3 5 kV Operating voltage 1 3 5 kV Bias voltage 3 2 kV at SEM Number of stages 17 Voltage divider 18 MΩ Admissible output current 10 5 A Bakeout temperature for dynode material 400 C CuBe SEV 218 Data a...

Page 49: ...s in vacuum Stainless steel Mo Al2O3 CuBe Ni W yttriated iridium Filament life 11 Tungsten 10000 h Yttriated iridium 10000 h Weight QMA 400 Faraday 2 9 kg QMA 400 90 SEM 10 7 kg QMA 410 Faraday 6 5 kg QMA 410 90 SEM 17 2 kg QMA 430 90 SEM 10 7 kg Tbl 7 Technical data 12 2 Dimensions 90 off axis SEM Faraday A B C D E F E 133 G 133 A B C E G Fig 23 Dimensions Dimensions in mm 11 Valid for p 10 5 hPa...

Page 50: ...CF F DN 63 CF DN 63 CF DN 63 CF G Ø 63 Ø 63 Ø 100 Ø 63 Ø 100 Tbl 8 Dimensions Ion source C mm H mm 12 Axial 26 Crossbeam 35 5 23 5 Crossbeam gas tight 13 48 14 23 5 Grille 27 Tbl 9 Dimensions of the ion sources 12 Distance to the center of the sensitive volume 13 With an axial gas connection 14 Without gas inlet line supply line outer diameter 3 mm Technical data and dimensions 50 52 ...

Page 51: ... 2014 30 EU Restriction of the use of certain hazardous substances 2011 65 EU Article 2 number 4 d e and j Harmonized standards and applied national standards and specifications DIN EN 61010 1 2011 07 DIN EN 61326 1 2013 07 DIN EN 55011 2009 A1 2010 Class A CISPR 11 2009 A1 2010 FCC Title 47 CFR Part 15 Class B ICES 001 Edition 4 Signature Pfeiffer Vacuum GmbH Berliner Straße 43 35614 Asslar Germa...

Page 52: ... BG5983 ed D Date 2210 P N BG5983BEN ...