How to Handle In-Vacuum and Cryo Stepper Motors
26
MA 1203-A010 EN
10 Technical Data
10.1 Vacuum Classes
v
a
c
uum
c
la
s
s
[h
P
a
]
wi
nding
tempe
ra
tu
re
[°
C]
ra
dia
tion re
-
si
s
tant up t
o
[J/k
g]
c
ondit
ioning of
th
e
c
omponents
Firs
t out
ga
s
s
ing
a
t
P
hy
tron
TML
[%]
CVCM
[%]
High vacuum HV
10
-7
–20 ...+200
10
2
–
option
–
–
Ultra high vacu-
um
UHV-S (solid
lubrication)
10
-11
–20 ... +200
10
6
yes
yes
< 1
< 0.1
UHV-G (grease
lubrication)
10
-11
–20 ... +300
10
6
yes
yes
< 1
< 0.1
Ultra high vacu-
um Cryo
UHV-C1
10
-11
–200 ... +40
10
6
yes
–
< 1
< 0.1
UHV-C2
10
-11
–270 ... +40
10
6
yes
–
< 1
< 0.1
10.2 Design Voltage
Motor Size
Design Voltage
Remarks
19 ... 57
70 V
DC
Operation with SELV type supplies
80 ... 126
120 V
DC
Operation with safe/double separation to
mains
10.3 Test Voltage
Motor Size
Housing
–
Motor Winding
Housing
–
Temperature Sensor
Motor Winding
–
Temperature Sensor
19 ... 42
480 V
AC
1 min
480 V
AC
1 min
480 V
AC
1 min
52 ... 126
1200 V
AC
1 min
1200 V
AC
1 min
1200 V
AC
1 min