How to Handle In-Vacuum and Cryo Stepper Motors
4
MA 1203-A010 EN
1 Legal Information
i
This manual:
Read this manual very carefully before mounting, installing and operating the
device and if necessary further manuals related to this product.
-
Please pay special attention to instructions that are marked as follows:
DANGER
–
Serious injury!
Indicates a high risk of serious injury or
death!
DANGER
–
Serious injury from
electric shock!
Indicates a high risk of serious injury or
death from electric shock!
WARNING
–
Serious injury pos-
sible!
Indicates a possible risk of serious injury
or death!
WARNING
–
Serious injury from
electric shock!
Indicates a possible risk of serious injury
or death from electric shock!
CAUTION
– Possi-
ble injury!
Indicates a possible risk of personal in-
jury.
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CAUTION
– Possi-
ble damage!
Indicates a possible risk of damage to
equipment.
CAUTION
– Possi-
ble damage due to
ESD!
Refers to a possible risk of equipment
damage from electrostatic discharge.
i
”Any heading“
Refers to an important paragraph in the
manual.