User Manual
A311D0002 Rev 2.0
11-Nov-2021
Page 1 of 26
PI (Physik Instrumente) L.P.
16 Albert Street, Auburn, MA 01501
Tel: 508-832-3456 Fax: 508-832-0506
Email: air@pi-usa.us
A-311.F & G Series
PIglide Compact Planar XY Air Bearing Stage
Linear Motor Driven with Encoder Feedback