10 Technical Data
M-687.UN XY Stage
MP100E
Version: 1.3.0
37
Subject to change. You can find the latest product specifications on the product web page at
www.pi.ws (https://www.pi.ws).
In this Chapter
Specifications ............................................................................................................................... 37
Ambient Conditions and Classifications ....................................................................................... 39
Influence of Downtimes on the Static Holding Force .................................................................. 39
Dimensions .................................................................................................................................. 40
Pin Assignment ............................................................................................................................ 42
10.1
Specifications
10.1.1
Data Table
M-687.UN
Unit
Tolerance
XY Stage for Inverted Nikon
Microscopes
Active axes
X, Y
Motion and positioning
Travel range
135 mm × 85 mm
Integrated sensor
Linear encoder
Sensor resolution
0.1
µm
Pitch / yaw
±300
µrad
Typ.
Velocity
120
mm/s
Max.
Reference switch
Optical, 1 µm repeatability
Limit switch
Hall effect
Mechanical properties
Load capacity
25
N
Max.
Drive properties
Motor type
PILine® ultrasonic piezo
motor, performance class 2
Connectors
Motor / sensor
2 × MDR14 (f)
10
Technical Data
