PI P-5 7 Series Manual Download

Page: 42 / 55

10 Technical Data

Version: 3.2.0

PZ82E

P-5x7/P-5x8 Positioners

Positioning

P-517.2CL P-517.2CD P-527.2CL P-527.2CD P-517.3CL P-517.3CD P-527.3CL P-527.3CD P-517.RCD P-527.RCD Tolerance

Bidirectional repeatability in

± 1 nm

typ.

System resolution in θZ

0.3 µrad

esolution in θZ, open loop

0.1 µrad

typ.

Bidirectional repeatability in

θZ

± 0.5 µrad ± 1 µrad

typ.

Drive properties

P-517.2CL P-517.2CD P-527.2CL P-527.2CD P-517.3CL P-517.3CD P-527.3CL P-527.3CD P-517.RCD P-527.RCD Tolerance

Drive type

PICMA®

Electrical capacitance in X

9.2 µF

4.6 µF

±20 %

Electrical capacitance in Y

9.2 µF

4.6 µF

±20 %

Electrical capacitance in Z

6 µF

±20 %

Mechanical properties

P-517.2CL P-517.2CD P-527.2CL P-527.2CD P-517.3CL P-517.3CD P-527.3CL P-527.3CD P-517.RCD P-527.RCD Tolerance

Guide

Flexure

guide with

lever

amplifica-

tion

Flexure

guide with

lever

amplifica-

tion

Flexure

guide with

lever

amplifica-

tion

Flexure

guide with

lever

amplifica-

tion

Flexure

guide with

lever

amplifica-

tion

Flexure

guide with

lever

amplifica-

tion

Flexure

guide with

lever

amplificati

Flexure

guide with

lever

amplifica-

tion

Flexure

guide with

lever

amplifica-

tion

Flexure

guide with

lever

amplifica-

tion

Stiffness in X

2 N/µm

1 N/µm

2 N/µm

1 N/µm

2 N/µm

1 N/µm

±20 %

Stiffness in Y

2 N/µm

1 N/µm

2 N/µm

1 N/µm

2 N/µm

1 N/µm

±20 %

Resonant frequency in X,

under load with 2500 g

140 Hz

110 Hz

140 Hz

110 Hz

140 Hz

110 Hz

±20 %

Resonant frequency in X,

under load with 500 g

250 Hz

190 Hz

250 Hz

190 Hz

250 Hz

190 Hz

±20 %

Resonant frequency in X,

unloaded

450 Hz

350 Hz

450 Hz

350 Hz

450 Hz

350 Hz

±20 %

Resonant frequency in Y,

under load with 2500 g

140 Hz

110 Hz

140 Hz

110 Hz

140 Hz

110 Hz

±20 %

Resonant frequency in Y,

under load with 500 g

250 Hz

190 Hz

250 Hz

190 Hz

250 Hz

190 Hz

±20 %

Resonant frequency in Y,

unloaded

450 Hz

350 Hz

450 Hz

350 Hz

450 Hz

350 Hz

±20 %

Permissible push force in Z

50 N

max.

Permissible pull force in Z

20 N

max.

Overall mass

1400 g

1450 g

1400 g

Material

Aluminum Aluminum Aluminum Aluminum Aluminum Aluminum Aluminum Aluminum Aluminum Aluminum

Stiffness in Z

15 N/µm

±20 %

Resonant frequency in Z,

unloaded

1100 Hz

±20 %

Stiffness in θZ

2 N·m/

µrad

1 N·m/

µrad

±20 %

Resonant frequency

in θZ,

unloaded

400 Hz

300 Hz

±20 %

Miscellaneous

P-517.2CL P-517.2CD P-527.2CL P-527.2CD P-517.3CL P-517.3CD P-527.3CL P-527.3CD P-517.RCD P-527.RCD Tolerance

Connector

LEMO

LVPZT

D-sub

25W3 (m)

LEMO

LVPZT

D-sub

25W3 (m)

LEMO

LVPZT

D-sub

25W3 (m)

LEMO

LVPZT

D-sub

25W3 (m)

D-sub

25W3 (m)

D-sub

25W3 (m)

Recommended controllers /

drivers

E-503,

E-505,

E-621,

E-712,

E-727

E-503,

E-505,

E-621,

E-712,

E-727

E-503,

E-505,

E-621,

E-712,

E-727

E-503,

E-505,

E-621,

E-712,

E-727

E-503,

E-505,

E-621,

E-712,

E-727

E-503,

E-505,

E-621,

E-712,

E-727

E-503,

E-505,

E-621,

E-712,

E-727

E-503,

E-505,

E-621,

E-712,

E-727

E-503,

E-505,

E-621,

E-712,

E-727

E-503,

E-505,

E-621,

E-712,

E-727

Cable length

1.5 m

Operating temperature

range

-20 to

80 °C

-20 to

80 °C

-20 to

80 °C

-20 to

80 °C

-20 to

80 °C

-20 to

80 °C

-20 to

80 °C

-20 to

80 °C

-20 to

80 °C

-20 to

80 °C

Permissible push/pull force in Z: When mounted horizontally (standing on a surface, not suspended).
Electrical capacitance: Specified per channel (refer to "Pin Assignment" (p. 45)).
The resolution of the system is limited only by the noise of the amplifier and the measuring technology because PI piezo nanopositioning systems are free of friction.
All specifications based on room temperature (22 °C ±3 °C).