10 Technical Data
P-5x7/P-5x8 Positioners
PZ82E
Version: 3.2.0
39
10.1.2
P-5x8 Data Table
Motion
P-558.ZCD P-558.ZCL P-518.ZCD P-518.ZCL P-528.ZCD P-528.ZCL P-558.TCD P-518.TCD P-528.TCD Tolerance
Active axes
Z
Z
Z
Z
Z
Z
Z, θX, θY
Z, θX, θY
Z, θX, θY
Travel range in Z
50 µm
50 µm
100 µm
100 µm
200 µm
200 µm
50 µm
100 µm
200 µm
Travel range in Z, open loop
60 µm
60 µm
140 µm
140 µm
240 µm
240 µm
60 µm
140 µm
240 µm
±20 %
Linearity error in Z
0.03 %
0.03 %
0.03 %
0.03 %
0.03 %
0.03 %
0.03 %
0.03 %
0.03 %
typ.
Ya
w (Rotational crosstalk in θX with
motion in Z)
± 25 µrad ± 25 µrad ± 25 µrad ± 25 µrad ± 50 µrad ± 50 µrad ± 25 µrad ± 25 µrad ± 50 µrad max.
Pitch (Rotational crosstalk in θY with
motion in Z)
± 25 µrad ± 25 µrad ± 25 µrad ± 25 µrad ± 50 µrad ± 50 µrad ± 25 µrad ± 25 µrad ± 50 µrad max.
Roll (Rotational crosstalk in θZ with
motion in Z)
± 5 µrad
± 5 µrad
± 5 µrad
± 5 µrad
± 10 µrad ± 10 µrad ± 5 µrad
± 5 µrad
± 10 µrad max.
Rotation range in θX
0.5 mrad
1 mrad
2 mrad
Rotation
range in θY
0.5 mrad
1 mrad
2 mrad
Rotation range in θX, open loop
0.6 mrad
1.4 mrad
2.4 mrad
±20 %
Rotation range in θ
Y, open loop
0.6 mrad
1.4 mrad
2.4 mrad
±20 %
Linearity error in θX
0.15 %
0.15 %
0.15 %
typ.
Linearity err
or in θY
0.15 %
0.15 %
0.15 %
typ.
Positioning
P-558.ZCD P-558.ZCL P-518.ZCD P-518.ZCL P-528.ZCD P-528.ZCL P-558.TCD P-518.TCD P-528.TCD Tolerance
Integrated sensor
Capacitive,
direct
position
measuring
Capacitive,
direct
position
measuring
Capacitive,
direct
position
measuring
Capacitive,
direct
position
measuring
Capacitive,
direct
position
measuring
Capacitive,
direct
position
measuring
Capacitive,
indirect
position
measuring
Capacitive,
indirect
position
measuring
Capacitive,
indirect
position
measuring
System resolution in Z
0.5 nm
0.5 nm
0.8 nm
0.8 nm
1 nm
1 nm
0.5 nm
0.8 nm
1 nm
Resolution in Z, open loop
0.2 nm
0.2 nm
0.2 nm
0.2 nm
0.6 nm
0.6 nm
0.2 nm
0.4 nm
0.6 nm
typ.
Bidirectional repeatability in Z
± 5 nm
± 5 nm
± 5 nm
± 5 nm
± 10 nm
± 10 nm
± 5 nm
± 5 nm
± 10 nm
typ.
System resolution in θX
0.05 µrad 0.05 µrad 0.1 µrad
System resolution in θY
0.05 µrad 0.05 µrad 0.1 µrad
Resolution in θX, open loop
0.02 µrad 0.04 µrad 0.06 µrad typ.
R
esolution in θY, op
en loop
0.02 µrad 0.04 µrad 0.06 µrad typ.
Bidirectional repeatability in θX
± 0.03
µrad
± 0.05
µrad
± 0.1 µrad typ.
Bidirectional repeatability in θY
± 0.03
µrad
± 0.05
µrad
± 0.1 µrad typ.
Drive properties
P-558.ZCD P-558.ZCL P-518.ZCD P-518.ZCL P-528.ZCD P-528.ZCL P-558.TCD P-518.TCD P-528.TCD Tolerance
Drive type
PICMA®
PICMA®
PICMA®
PICMA®
PICMA®
PICMA®
PICMA®
PICMA®
PICMA®
Electrical capacitance in Z
6 µF
6 µF
8.4 µF
8.4 µF
14.8 µF
14.8 µF
1.5 µF
2.1 µF
3.7 µF
±20 %
Mechanical properties
P-558.ZCD P-558.ZCL P-518.ZCD P-518.ZCL P-528.ZCD P-528.ZCL P-558.TCD P-518.TCD P-528.TCD Tolerance
Guide
Flexure
guide with
lever
amplifica-
tion
Flexure
guide with
lever
amplifica-
tion
Flexure
guide with
lever
amplifica-
tion
Flexure
guide with
lever
amplifica-
tion
Flexure
guide with
lever
amplifica-
tion
Flexure
guide with
lever
amplifica-
tion
Flexure
guide with
lever
amplifica-
tion
Flexure
guide with
lever
amplifica-
tion
Flexure
guide with
lever
amplifica-
tion
Stiffness in Z
4 N/µm
4 N/µm
2.7 N/µm 2.7 N/µm 1.5 N/µm 1.5 N/µm 4 N/µm
2.7 N/µm 1.5 N/µm ±20 %
Resonant frequency in Z, under load
with 2500 g
245 Hz
245 Hz
200 Hz
200 Hz
130 Hz
130 Hz
245 Hz
200 Hz
130 Hz
±20 %
Resonant frequency in Z, under load
with 500 g
410 Hz
410 Hz
350 Hz
350 Hz
210 Hz
210 Hz
410 Hz
350 Hz
210 Hz
±20 %
Resonant frequency in Z, unloaded
570 Hz
570 Hz
500 Hz
500 Hz
350 Hz
350 Hz
570 Hz
500 Hz
350 Hz
±20 %
Permissible push force in Z
50 N
50 N
50 N
50 N
50 N
50 N
50 N
50 N
50 N
max.
