PI P-5 7 Series, Manual

Page 1: ...CL 200 m 200 m P 517 P 527 Precision XYZ nanopositioner P 517 3CD 3CL 100 m 100 m 20 m P 527 3CD 3CL 200 m 200 m 20 m P 517 P 527 Precision XY rotation nanopositioner P 517 RCD 100 m 100 m 2 mrad P 52...

Page 2: ...I GmbH Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente PI GmbH Co KG retains all the rights The use of any te...

Page 3: ...0 3 3 Scope of Delivery 11 3 4 Suitable Electronics 11 3 5 Accessories 12 3 6 Technical Features 13 3 6 1 PICMA Piezo Actuators 13 3 6 2 Flexure Guides 13 3 6 3 Capacitive Sensors 13 3 6 4 ID Chip Mod...

Page 4: ...Customer Service 35 10 Technical Data 37 10 1 Specifications 37 10 1 1 P 5x7 Data Table 37 10 1 2 P 5x8 Data Table 39 10 1 3 Maximum Ratings 40 10 2 Ambient Conditions and Classifications 41 10 3 Dim...

Page 5: ...p 9 Basic knowledge of control technology drive technologies and suitable safety measures is assumed The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols a...

Page 6: ...nation Positioner Electrically driven mechanics here P 5x7 P 5x8 with one or more motion axes Electronics Piezo amplifier or piezo controller that supplies the operating voltage for positioners or pie...

Page 7: ...m PZ195E user manual E 727 digital multi channel piezo controller E727T0005 user manual E 754 digital piezo controller E754T0001 user manual PIMikroMove SM148E software manual P 5xx P 6xx P 7xx piezo...

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Page 9: ...axis rotationally X Y Z TCD In one axis vertically and in two axes rotationally Z X Y The P 5x7 P 5x8 can only be used as intended in conjunction with suitable electronics p 11 available from PI The...

Page 10: ...ronics If a protective earth conductor is not or not properly connected dangerous touch voltages can occur on the P 5x7 P 5x8 in the case of malfunction or failure of the system If there are touch vol...

Page 11: ...tes If you give the P 5x7 P 5x8 to a third party include this user manual as well as other relevant information provided by the manufacturer Do the work only if the user manual is complete Missing inf...

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Page 13: ...pacitive sensors parallel metrology D sub connector P 517 3CL Precision XYZ nanopositioner 100 m 100 m 20 m capacitive sensors parallel metrology LEMO connectors P 527 3CD Precision XYZ nanopositioner...

Page 14: ...sensors LEMO connectors P 558 TCD Precision nanopositioning Z and tip tilt stage 50 m 0 5 mrad parallel metrology capacitive sensors D sub connector P 518 TCD Precision nanopositioning Z and tip tilt...

Page 15: ...s to operate a P 5x7 P 5x8 Selecting the device depends on the application and the connectors available Electronics Connector s Channels E 505 piezo amplifier module LEMO 1 E 610 piezo amplifier servo...

Page 16: ...sensors 1 channel length 0 3 m P 895 3DLC Adapter cable D sub 25W3 f to LEMO for piezo actuator nanopositioning systems with capacitive sensors 3 channels length 0 3 m Adapter cable with D sub mechani...

Page 17: ...re elements have a high stiffness and load capacity Flexure guides are maintenance and wear free They are 100 vacuum compatible function in a wide temperature range and do not require any lubricants 3...

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Page 19: ...8 The P 5x7 P 5x8 is delivered with a transport safeguard attached The following figures serve as examples and can differ from your positioner model Figure 2 Exemplary view Positioner with transport s...

Page 20: ...a surface with the support frame facing downwards b Release the four plastic screws with a screwdriver In the following figure one of the screws is marked with an arrow c Remove the plastic screws and...

Page 21: ...rupt contraction Do not open the P 5x7 P 5x8 Discharge the positioner s piezo actuators before installing Connect the positioner to the switched off PI electronics equipped with an internal discharge...

Page 22: ...screws Incorrectly tightened screws can cause damage Pay attention to the torque range p 45 specified for the screws used during installation INFORMATION Extension cables can reduce the positioning a...

Page 23: ...tronics Tools and accessories Suitable protective earth conductor Cable cross section 0 75 mm2 M4 protective earth screw set p 11 supplied for connecting the protective earth conductor Suitable screwd...

Page 24: ...horizontal orientation standing on a surface not suspended Mounting in other orientations can cause tensile stress that reduces the preload and destroys the piezo actuator If you want to mount the P 5...

Page 25: ...eral can overload the platform of the P 5x7 P 5x8 Mechanical overload can damage the piezo actuators sensors and flexures of the P 5x7 P 5x8 and lead to loss of accuracy Avoid torques on the platform...

Page 26: ...rm adjust the controller settings before starting and operating or or contact our customer service department p 35 NOTICE Excessively long screws The P 5x7 P 5x8 could be damaged by screws inserted to...

Page 27: ...size and length p 42 Suitable screwdriver Fixing the load 1 Align the load on the P 5x7 P 5x8 so that the mounting holes in the load and motion platform are in line 2 Insert the screws through the ho...

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Page 29: ...5x8 to the protective earth conductor before restarting NOTICE Destruction of the piezo actuator due to electric flashovers Using the P 5x7 P 5x8 in environments that increase the electrical conducti...

Page 30: ...sed loop operation switch off the servo mode immediately In open loop operation stop the P 5x7 P 5x8 immediately INFORMATION The positive direction of motion is specified in the dimensional drawing p...

Page 31: ...and operating the P 5x7 P 5x8 in the manual for the electronics p 11 used 6 3 Discharging the P 5x7 P 5x8 The P 5x7 P 5x8 must be discharged in the following cases Before Installation When the P 5x7...

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Page 33: ...nstructed in this manual Do not open the P 5x7 P 5x8 7 2 Packing the P 5x7 P 5x8 for Transport NOTICE Mechanical overload due to incorrect handling Impermissible mechanical overload of the motion plat...

Page 34: ...oner onto the support frame with its top facing downwards c Align the positioner so that the mounting holes in the positioner are in line with the mounting holes in the supporting frame d Attach the s...

Page 35: ...ing can damage the P 5x7 P 5x8 Do not do any ultrasonic cleaning Requirements You have discharged the piezo actuators of the P 5x7 P 5x8 p 27 You have disconnected the P 5x7 P 5x8 from the electronics...

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Page 37: ...5x7 P 5x8 onto surfaces with the following characteristics only Flatness of at least 20 m The thermal expansion properties are similar to those of the P 5x7 P 5x8 e g surface made of aluminum Mount l...

Page 38: ...rs incorrectly set because for example the load was changed 1 Switch off the servo mode of the corresponding motion axes immediately 2 Check the settings of the servo control parameters on the control...

Page 39: ...ation Product and serial numbers of all products in the system Firmware version of the controller if applicable Version of the driver or the software if applicable Operating system on the PC if applic...

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Page 41: ...arity error in Z 0 03 0 03 0 03 0 03 typ Rotation range in Z 1 mrad 2 mrad Rotation range in Z open loop 2 6 mrad 5 mrad 20 Linearity error in Z 0 15 0 15 typ Positioning P 517 2CL P 517 2CD P 527 2CL...

Page 42: ...y in Y under load with 2500 g 140 Hz 140 Hz 110 Hz 110 Hz 140 Hz 140 Hz 110 Hz 110 Hz 140 Hz 110 Hz 20 Resonant frequency in Y under load with 500 g 250 Hz 250 Hz 190 Hz 190 Hz 250 Hz 250 Hz 190 Hz 19...

Page 43: ...nm 0 8 nm 1 nm 1 nm 0 5 nm 0 8 nm 1 nm Resolution in Z open loop 0 2 nm 0 2 nm 0 2 nm 0 2 nm 0 6 nm 0 6 nm 0 2 nm 0 4 nm 0 6 nm typ Bidirectional repeatability in Z 5 nm 5 nm 5 nm 5 nm 10 nm 10 nm 5...

Page 44: ...625 E 712 E 727 E 754 E 503 E 505 E 610 E 621 E 625 E 712 E 727 E 754 E 503 E 505 E 610 E 621 E 625 E 712 E 727 E 754 E 503 E 505 E 610 E 621 E 625 E 712 E 727 E 754 E 503 E 505 E 610 E 621 E 625 E 71...

Page 45: ...maximum power consumption Details can be found at the following website https www physikinstrumente com en technology piezo technology properties piezo actuators electrical operation 10 2 Ambient Cond...

Page 46: ...10 Technical Data 42 Version 3 2 0 PZ82E P 5x7 P 5x8 Positioners 10 3 Dimensions Figure 9 P 5x7 dimensions in mm Note that a comma is used in the drawings instead of a decimal point...

Page 47: ...10 Technical Data P 5x7 P 5x8 Positioners PZ82E Version 3 2 0 43 Figure 10 P 5x8 TCx dimensions in mm Note that a comma is used in the drawings instead of a decimal point...

Page 48: ...10 Technical Data 44 Version 3 2 0 PZ82E P 5x7 P 5x8 Positioners Figure 11 P 5x8 ZCx dimensions in mm Note that a comma is used in the drawings instead of a decimal point...

Page 49: ...ive material according to the VDI directive 2230 10 5 Pin Assignment D sub 7W2 connector m For P 5x8 ZCD only Figure 12 D sub 7W2 m connector Front with connections Pin Signal Function A1 inner conduc...

Page 50: ...ut Probe sensor signal channel 1 immovable part of the capacitive sensor A3 outer conductor GND Shielding for probe sensor signal channel 1 1 Input Target sensor signal channel 2 movable part of the c...

Page 51: ...nnel 2 Pins 9 and 20 Channel 3 Pins 8 and 19 Channel 4 Pins 7 and 18 Channel 1 Pins A3 11 and 22 Channel 2 Pins A1 1 and 12 Channel 3 Pins A2 2 and 13 P 5x7 2CD X X X X P 5x7 3CD P 5x7 RCD P 5x8 TCD X...

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Page 53: ...ational national and local rules and regulations In order to fulfill its responsibility as the product manufacturer Physik Instrumente PI GmbH Co KG undertakes environmentally correct disposal of all...

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Page 55: ...ns of conformity were issued according to the following European statutory requirements Low Voltage Directive EMC Directive RoHS Directive The standards applied for certifying conformity are listed be...