10 Technical Data
P54x Nanopositioner
PZ244E
Version: 1.2.0
35
In this Chapter
Specifications ............................................................................................................................... 35
Dimensions .................................................................................................................................. 40
Torque for Stainless Steel Screws (A2-70) ................................................................................... 42
Pin Assignment ............................................................................................................................ 42
10.1
Specifications
10.1.1
Data Table
P541.2CD /
P541.2CL
P542.2CD /
P542.2CL
P541.2DD P541.2SL
P542.2SL
P541.20L /
P542.20L
Unit
Tolerance
Active axes
X, Y
X, Y
X, Y
X, Y
X, Y
X, Y
Motion and positioning
Integrated sensor
Capacitive Capacitive Capacitive SGS
SGS
–
Travel range at -20 to
+120 V, open loop
150 µm ×
150 µm
250 µm ×
250 µm
60 µm ×
60 µm
150 µm ×
150 µm
250 µm ×
250 µm
See
P-541.2CD /
P-542.2CD
+20 % /
-0 %
Travel range, closed loop
100 µm ×
100 µm
200 µm ×
200 µm
45 µm ×
45 µm
100 µm ×
100 µm
200 µm ×
200 µm
–
Resolution, open loop /
closed loop
0.2 / 0.3
0.4 / 0.7
0.1 / 0.3
0.2 / 2.5
0.4 / 4
Open loop
0.2 / 0.4
nm
typ.
Linearity error
0.03
0.03
0.03*
0.2
0.2
–
%
typ.
Repeatability
<5
<5
<5
<10
<10
–
nm
typ.
Pitch
<5
<5
<3
<5
<5
<5
µrad
typ.
Yaw
<10
<10
<3
<10
<10
<10
µrad
typ.
Mechanical properties
Stiffness in motion direction 0.47
0.4
10
0.47
0.4
0.47 / 0.4
N/µm ±20 %
Resonant frequency, no
load
255
230
1550
255
230
255 / 230
Hz
±20 %
Resonant frequency, under
load, 100 g
200
190
–
200
190
200 / 190
Hz
±20 %
Resonant frequency, under
load, 200 g
180
–
1230
180
–
180 / –
Hz
±20 %
Resonant frequency, under
load, 300 g
150
145
–
150
145
150 / 145
Hz
±20 %
Push/pull force capacity in
motion direction
100 / 30
100 / 30
100 / 30
100 / 30
100 / 30
100 / 30
N
max.
Load capacity
20
20
20
20
20
20
N
max.
10
Technical Data
