3 Product Description
14
Version: 1.1.0
PZ272E
P-545 Nanopositioners
Piezoresistive strain sensors
Piezoresistive strain sensors consist of a thin semiconductor foil, which is attached to the piezo
ceramic or, for improved precision, to the guiding system of a flexure positioner. This type of
position measuring is indirect and requires contact because the position of the motion platform
is derived from a measurement on the lever, guide, or piezo stack. Strain gauge sensors derive
the position information from their expansion. Full-bridge circuits with several strain gauge
sensors per axis improve thermal stability.
3.7
Integration of the P-545 into Microscopes
P-545 positioners can be easily integrated in microscopes. For this purpose, a P-545 is mounted
on an M-545 XY stage. For further information, refer to "Accessories" (p. 12) and "Mounting the
P-545 onto an M-545 XY Stage" (p. 22).
Figure 4: P-545 stage and M-545 XY stage in a microscope (section)
1: Upper focal plane (approx. 3 mm above the lower mounting surface)
2: Lower focal plane limit (approx. 10 mm below upper limit, depending on the
microscope)
3: Microscope objective
