10 Technical Data
P-62x Positioners
PZ234D
Version: 1.2.0
43
P-620.2CD
P-620.2CL
P-621.2CD
P-621.2CL
P-622.2CD
P-622.2CL
P-625.2CD
P-625.2CL
P-628.2CD
P-628.2CL
P-629.2CD
P-629.2CL
Unit
Tolerance
Active axes
X, Y
X, Y
X, Y
X, Y
X, Y
X, Y
Motion and
positioning
Integrated sensor
Capacitive
Capacitive
Capacitive
Capacitive
Capacitive
Capacitive
Travel range in X, Y at -
20 to 120 V, open loop
60
120
300
600
950
1800
µm
+20 % /
-0 %
Travel range in X, Y,
closed loop
50
100
250
500
800
1500
µm
Resolution in X, Y, open
loop
0.1
0.2
0.4
0.5
0.5
2
nm
typ.
Resolution in X, Y,
closed loop
0.2
0.4
0.7
1.4
3.5
3.5
nm
typ.
Linearity error in X, Y
0.02
0.02
0.02
0.03
0.03*
0.03**
%
typ.
Repeatability X, Y
±2
±2
±2
±5
±10
±14
nm
typ.
Pitch / yaw
±3
±3
±3
±3 / ±5
±20 / ±5
±30 / ±5
µrad
typ.
Mechanical properties
Stiffness X, Y
0.22
0.25
0.2
0.1
0.05
0.1
N/µm ±20 %
Resonant frequency in
X, no load
575
420
225
135
75
60
Hz
±20 %
Resonant frequency in
Y, no load
800
535
300
195
105
100
Hz
±20 %
Resonant frequency in
X, under load, 50 g
270
285
180
120
60
55
Hz
±20 %
Resonant frequency in
Y, under load, 50 g
395
365
215
150
85
85
Hz
±20 %
Resonant frequency in
X, under load 100 g
285
220
160
105
55
50
Hz
±20 %
Resonant frequency in
Y, under load, 100 g
300
285
175
125
75
80
Hz
±20 %
Push/pull force
capacity in motion
direction
10 / 5
10 / 8
10 / 8
10 / 8
10 / 8
10 / 8
N
max.
Load capacity
10
10
10
10
10
10
N
max.
Lateral load capacity
10
10
10
10
10
10
N
max.
Drive properties
Piezo ceramic
PICMA®
P-883
PICMA®
P-885
PICMA®
P-885
PICMA®
P-885
PICMA®
P-887
PICMA®
P-888
Electrical capacitance
in X, Y
0.35
1.5
3.1
6.2
19
52
µF
±20 %
