PI P-62 Series, User Manual

Page 1: ...linear stage P 620 1CD 1CL 10L P 621 1CD 1CL 10L 1U P 622 1CD 1CL 10L 1U P 625 1CD 1CL 10L P 628 1CD 1CL 10L P 629 1CD 1CL 10L P 620 P 621 P 622 P 625 P 628 P 629 PIHera piezo XY stage P 620 2CD 2CL...

Page 2: ...GmbH Co KG Karlsruhe Germany The text photographs and drawings in this manual are protected by copyright With regard thereto Physik Instrumente PI GmbH Co KG retains all the rights The use of any tex...

Page 3: ...3 3 4 Scope of Delivery 14 3 5 Suitable Electronics 15 3 6 Accessories 15 3 7 Technical Features 16 3 7 1 PICMA Piezo Actuators 16 3 7 2 Flexure Guides 16 3 7 3 Capacitive Sensors 17 3 7 4 ID Chip Mod...

Page 4: ...ications 41 10 1 1 Data Table 41 10 1 2 Materials Used for Vacuum Compatible Models 45 10 1 3 Maximum Ratings 46 10 1 4 Ambient Conditions and Classifications 47 10 2 Dimensions 48 10 3 Torque for Sta...

Page 5: ...asic knowledge of control technology drive technologies and suitable safety measures is assumed The latest versions of the user manuals are available for download p 3 on our website 1 2 Symbols and Ty...

Page 6: ...e operating voltage for positioners or piezo actuators Piezo amplifier Electronics without sensor evaluation for open loop operating of positioners and piezo actuators Piezo controller Electronics wit...

Page 7: ...al Multi Channel Piezo Controller E 754 Digital Piezo Controller E754T0001 User Manual PIMikroMove SM148E Software Manual P 5xx P 6xx P 7xx Piezo Positioning Systems PZ240EK Short Instructions 1 6 Dow...

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Page 9: ...ing is only possible under certain conditions The P 62x can only be used as intended in conjunction with suitable electronics p 15 available from PI The electronics are not included in the P 62x s sco...

Page 10: ...eing pulled out of the electronics If a protective earth conductor is not or not properly connected dangerous touch voltages can occur on the P 62x in the case of malfunction or failure of the system...

Page 11: ...l notes If you give the P 62x to a third party include this user manual as well as other relevant information provided by the manufacturer Do the work only if the user manual is complete Missing infor...

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Page 13: ...sion linear nanopositioner 100 m direct position measuring capacitive sensor D sub connector P 621 1CL PIHera precision linear nanopositioner 100 m direct position measuring capacitive sensor LEMO con...

Page 14: ...1U PIHera precision linear nanopositioner 100 m direct position measuring capacitive sensor D sub connector vacuum compatible to 10 9 hPa P 622 1U PIHera precision linear nanopositioner 250 m direct p...

Page 15: ...m without sensors LEMO connectors P 629 2CD PIHera precision XY nanopositioner 1500 m 1500 m direct position measuring capacitive sensors D sub connector P 629 2CL PIHera precision XY nanopositioner...

Page 16: ...EMO connectors P 622 ZCD Precise PIHera vertical nanopositioning stage 250 m direct position measuring capacitive sensor D sub connector P 622 ZCL Precise PIHera vertical nanopositioning stage 250 m d...

Page 17: ...duct number example 123456789 Serial number example individual for each P 62x Meaning of each position from the left 1 internal information 2 and 3 year of manufacture 4 to 9 consecutive number PIHera...

Page 18: ...4x8 ISO 7045 2 lock washers 2 flat washers All models except P 620 and P 621 2xx 2U 000036451 M2 screw set for protective earth consisting of 4 socket head screws M2x12 ISO 4762 4 lock washers 4 dowel...

Page 19: ...ntroller D sub 25W3 3 E 727 xF digital multi channel piezo controller D sub 25W3 3 E 712 digital piezo controller modular system D sub 25W3 3 6 In some cases adapter cables p 15 are necessary for conn...

Page 20: ...ontact our customer service department p 39 3 7 Technical Features 3 7 1 PICMA Piezo Actuators P 62x positioners are driven by PICMA piezo actuators PICMA actuators have all ceramic insulation and the...

Page 21: ...electronics capacitive sensors achieve the best resolution stability and bandwidth 3 7 4 ID Chip Models with D sub 7W2 Connector Only An ID chip is located in the D sub connector of the P 62x When the...

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Page 23: ...all parts are cleaned before assembly Powder free gloves are worn during assembly and measuring In addition the positioner is wipe cleaned afterwards and then shrink wrapped twice in vacuum compatibl...

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Page 25: ...not open the P 62x Discharge the positioner s piezo actuators before installing Connect the positioner to the switched off PI electronics equipped with an internal discharge resistor Do not pull the...

Page 26: ...g to the specifications p 41 Hold the load when tightening or loosening the screws NOTICE Protruding screw heads Protruding screw heads can damage the P 62x Ensure that the screw heads do not protrude...

Page 27: ...orientation The P 62x is intended for mounting in horizontal orientation standing on a surface not suspended Mounting in other orientations can cause tensile stress that reduces the preload and destro...

Page 28: ...p 21 The P 62x is not connected to the controller Tools and accessories If a screw set for fixing the positioner onto an underlying surface is not included in the scope of delivery p 14 Screws of sui...

Page 29: ...ovided 5 3 Connecting the P 62x to the Protective Earth Conductor INFORMATION In the case of P 62x positioners with D sub connectors ground loops can occur when the positioner is grounded via its prot...

Page 30: ...ion 0 75 mm2 Suitable screwdriver All models except P 620 and P 621 2xx 2U M4 protective earth conductor screw set p 14 for connecting the protective earth conductor When mounting a P 620 and a P 621...

Page 31: ...rew 5 Cable lug 6 Protective earth conductor 1 If necessary attach a suitable cable lug to the protective earth conductor 2 Use the M4 screw together with the flat and lock washers to fix the cable lu...

Page 32: ...lly conductive surface connected to a suitable protective earth conductor a If the screw set includes lock washers place a lock washer onto each screw b Insert a screw into each of the four mounting h...

Page 33: ...r p 25 You have installed the P 890 vacuum feedthrough p 15 into your vacuum chamber Use the P 890 1CV vacuum feedthrough for operating single axis positioners Use the P 890 2CV vacuum feedthrough for...

Page 34: ...5 Installation 30 Version 1 2 0 PZ234D P 62x Positioners Figure 11 Connection of the 2U vacuum version to the electronics with P 890 2CV vacuum feedthrough...

Page 35: ...ective earth conductor has to be removed temporarily e g in the case of modifications reconnect the P 62x to the protective earth conductor before restarting NOTICE Destruction of the piezo actuator d...

Page 36: ...d by a humming noise and can be caused by the following A change in the load and or dynamics requires the servo control parameters to be adjusted The P 62x is operated near to its resonant frequency I...

Page 37: ...P 62x 6 3 Discharging the P 62x The P 62x must be discharged in the following cases Before Installation When the P 62x is not in use but the electronics remain switched on to ensure temperature stabi...

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Page 39: ...ructed in this manual Do not open the P 62x 7 2 Cleaning the P 62x NOTICE Damage from ultrasonic cleaning Ultrasonic cleaning can damage the P 62x Do not do any ultrasonic cleaning Requirements You ha...

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Page 41: ...s distorted Mount the P 62x onto surfaces with the following characteristics only Flatness of at least 20 m The thermal expansion properties are similar to those of the P 62x e g surfaces made of alum...

Page 42: ...ecause for example the load was changed 1 Switch off the servo mode of the corresponding motion axes immediately 2 Check the settings of the servo control parameters on the controller 3 Adjust the ser...

Page 43: ...on Product and serial numbers of all products in the system Firmware version of the controller if applicable Version of the driver or the software if applicable Operating system on the PC if applicabl...

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Page 45: ...p 60 120 300 600 950 1800 m 20 0 Travel range closed loop 50 100 250 500 800 1500 m Resolution closed loop open loop 0 2 0 1 0 4 0 2 0 7 0 4 1 4 0 5 1 8 0 5 3 2 nm typ Linearity error closed loop 0 02...

Page 46: ...rsions LEMO CD versions D sub 7W2 CL versions LEMO CD versions D sub 7W2 CL versions LEMO CD versions D sub 7W2 CL versions LEMO CD versions D sub 7W2 CL versions LEMO Recommended electronics E 503 E...

Page 47: ...ty X Y 2 2 2 5 10 14 nm typ Pitch yaw 3 3 3 3 5 20 5 30 5 rad typ Mechanical properties Stiffness X Y 0 22 0 25 0 2 0 1 0 05 0 1 N m 20 Resonant frequency in X no load 575 420 225 135 75 60 Hz 20 Reso...

Page 48: ...ns LEMO CD versions D sub 7W2 m CL versions LEMO CD versions D sub 7W2 m CL versions LEMO Recommended electronics E 503 E 505 E 663 E 712 E 727 x E 727 xAP E 727 xF E 503 E 505 E 663 E 712 E 727 x E 7...

Page 49: ...A P 885 Electrical capacitance 0 7 3 6 2 F 20 Miscellaneous Operating temperature range 20 to 80 20 to 80 20 to 80 C Material Aluminum Aluminum Aluminum Dimensions 30 mm 30 mm 15 mm 40 mm 40 mm 17 5 m...

Page 50: ...in X and Y P 622 2x x 20 to 120 V 100 Hz in X and Y 7 W in X and Y P 625 2xx 20 to 120 V 65 Hz in X and Y 9 W in X and Y P 628 2xx 20 to 120 V 35 Hz in X and Y 15 W in X and Y P 629 2xx 20 to 120 V 3...

Page 51: ...0 1 hPa Vacuum compatible models 1100 hPa to 10 9 hPa Relative humidity Highest relative air humidity 80 for temperatures to 31 C Decreasing linearly to 50 relative air humidity at 40 C Operating tem...

Page 52: ...24 15 12 15 18 19 24 15 P 621 1x x 40 15 30 20 14 18 24 26 26 20 P 622 1x x 50 15 40 24 20 25 30 35 35 24 P 625 1xx 60 15 50 40 27 32 44 5 46 46 40 P 628 1xx 80 17 70 58 41 45 63 66 66 58 P 629 1xx 1...

Page 53: ...connector A B C D E F G H J K L M N P 620 2xx 30 21 5 24 24 19 1 01 1 5 M2 3 5 5 1 2 2 9 6 P 621 2x x 40 25 30 26 26 1 51 2 5 M3 5 6 25 3 2 10 5 P 622 2x x 50 25 40 35 35 1 51 2 5 M3 5 6 25 3 2 11 5...

Page 54: ...P 62x ZCD ZCL Z0L The P 620 does not have a separate protective earth connector A B C D E F G H J K L M N P 620 Zxx 30 15 24 19 24 1 01 2 M2 28 5 2 2 4 5 6 P 621 Zxx 40 17 5 30 26 26 1 51 2 5 M3 36 5...

Page 55: ...y attention to the screw in depth required for the respective material according to the VDI directive 2230 10 4 Maximum Torque on the Platform The following torque may not be exceeded when mounting a...

Page 56: ...16 D sub connector Example top view Pin Signal Function A1 PZT Piezo voltage A2 Probe Probe sensor signal immovable part of the capacitive sensor 1 Data ID chip Data line for ID chip 2 GND Target and...

Page 57: ...gnal shield 1 Target Target sensor signal movable part of the capacitive sensor 2 PZT Piezo voltage 3 GND Target Target sensor signal shield 4 PZT Piezo voltage LEMO coaxial connectors Figure 18 LEMO...

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Page 59: ...ional national and local rules and regulations In order to fulfil its responsibility as the product manufacturer Physik Instrumente PI GmbH Co KG undertakes environmentally correct disposal of all old...

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Page 61: ...nformity has been issued in accordance with the following European directives Low Voltage Directive EMC Directive RoHS Directive The applied standards certifying the conformity are listed below Safety...