10 Technical Data
P-62x Positioners
PZ234D
Version: 1.2.0
41
In this Chapter
Specifications ............................................................................................................................... 41
Dimensions .................................................................................................................................. 48
Torque for Stainless Steel Screws (A2-70) ................................................................................... 51
Maximum Torque on the Platform .............................................................................................. 51
Pin Assignment ............................................................................................................................ 52
10.1
Specifications
10.1.1
Data Table
P-620.1CD
P-620.1CL
P-621.1CD
P-621.1CL
P-622.1CD
P-622.1CL
P-625.1CD
P-625.1CL
P-628.1CD
P-628.1CL
P-629.1CD
P-629.1CL
Unit
Tolerance
Active axes
X
X
X
X
X
X
Motion and
positioning
Integrated sensor
Capacitive
Capacitive
Capacitive
Capacitive
Capacitive
Capacitive
Travel range at -20 to
120 V, open loop
60
120
300
600
950
1800
µm
+20 % /
-0 %
Travel range, closed
loop
50
100
250
500
800
1500
µm
Resolution, closed loop
/ open loop
0.2 / 0.1
0.4 / 0.2
0.7 / 0.4
1.4 / 0.5
1.8 / 0.5
3 / 2
nm
typ.
Linearity error, closed
loop
0.02
0.02
0.02
0.03
0.03*
0.03**
%
typ.
Repeatability
±1
±1
±1
±5
±10
±14
nm
typ.
Pitch / yaw
±3
±3
±3
±6
±6
±30 / ±10
µrad
typ.
Mechanical properties
Stiffness in motion
direction
0.42
0.35
0.2
0.1
0.12
0.13
N/µm ±20 %
Resonant frequency,
no load
1100
800
400
215
125
125
Hz
±20 %
Resonant frequency,
under load, 20 g
550
520
340
180
115
120
Hz
±20 %
Resonant frequency,
under load, 120 g
260
240
185
110
90
110
Hz
±20 %
Push/pull force
capacity in motion
direction
10
10
10
10
10
10
N
max.
Load capacity
10
10
10
10
10
10
N
max.
Lateral load capacity
10
10
10
10
10
8
N
max.
10
Technical Data
