10 Technical Data
P763 Nanopositioner
PZ258E
Version: 1.1.0
33
In this Chapter
Specifications ............................................................................................................................... 33
Ambient Conditions and Classifications ....................................................................................... 34
Dimensions .................................................................................................................................. 35
Torque for Stainless Steel Screws (A2-70) ................................................................................... 36
Pin Assignment ............................................................................................................................ 36
10.1
Specifications
10.1.1
Data Table
P763.22C
Unit
Tolerance
Active axes
X, Y
Motion and positioning
Integrated sensor
Capacitive
Travel range in X, Y, closed loop 200
µm
Resolution in X, Y, open loop
1
nm
Typ.
Resolution in X, Y, closed loop
2
nm
Linearity error in X, Y
0.02
%
Typ.
Repeatability X, Y
±5
nm
Typ.
Mechanical properties
Resonant frequency in X, under
load, 260 g
180
Hz
±20 %
Load capacity
10
N
Max.
Drive properties
Piezo ceramic
PICMA® P-887
Electrical capacitance in X, Y
12.8
µF
±20 %
Miscellaneous
Operating temperature range
-20 to 80
°C
Material
Aluminum, steel
Dimensions
70 mm × 70 mm × 25 mm
Clear aperture
30 mm × 30 mm
Cable length
1.5
m
±10 mm
Sensor/voltage connector
2 × D-sub 7W2 (m)
Recommended electronics
E-727 (with P-895.2DDC adapter cable)
10
Technical Data
