10 Technical Data
P763 Nanopositioner
PZ258E
Version: 1.1.0
37
Pin
Signal
Function
A1
PZT
Piezo voltage
A2
Probe
Probe sensor signal (immovable part of the
capacitive sensor)
1
Data ID chip
Data line for ID chip
2
GND Target and ID chip
Target and ID chip ground
3
GND PZT
Piezo voltage ground
4
---
(not connected)
5
Target
Target sensor signal (movable part of the
capacitive sensor)
Housing
---
Shield
