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2018-11-13
P725T0010, valid for P-725
Physik Instrumente (PI ) GmbH & Co. KG, Auf der Roemerstr. 1, 76228 Karlsruhe/Germany
Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws,
www.pi.ws
Technical Data
P-725 PIFOC Long-Travel Objective Scanner
Model
P-725.1CL
P-725.1CD
P-725.1CA
P-725.2CL
P-725.2CD
P-725.2CA
P-725.4CL
P-725.4CD
P-725.4CA
P-725.x0L
open-loop
version
Unit
Tolerance
Active axes
Z
Z
Z
Z
Motion and
positioning
Integrated sensor
Capacitive
Capacitive
Capacitive
-
Open-loop travel,
-20 to +120V
150
330
460
as P-725.xCL
µm
min. (+20 %/
-0 %)
Closed-loop travel
100
250
400
-
µm
calibrated
Open-loop resolution 0.3
0.4
0.5
as P-725.xCL
nm
typ.
Closed-loop
resolution
0.65
0.75
1.25
-
nm
typ.
Linearity, closed-
loop
0.03
0.03
0.03
-
%
typ.
Repeatability
±5
±5
±5
-
nm
typ.
Runout
θ
X
1
6
10
as P-725.xCL
µrad
typ.
Runout
θ
Y
20
45
45
as P-725.xCL
µrad
typ.
Crosstalk in X
20
20
60
as P-725.xCL
nm
typ.
Crosstalk in Y
20
40
60
as P-725.xCL
nm
typ.
Mechanical
properties
Stiffness in motion
direction
0.23
0.17
0.12
as P-725.xCL
N/µm
±20 %
Unloaded resonant
frequency
470
330
230
as P-725.xCL
Hz
±20 %
Resonant frequency
at 150 g
185
140
120
as P-725.xCL
Hz
±20 %