12
Technical Data
12.1
Specifications
Motion
V-412.03
V-412.05
V-412.09
V-412.13
Unit
Toler-
ance
Active axes
X
X
X
X
Travel range
52
102
204
305
mm
Pitch / yaw
±9
±14
±19
±29
μrad
Max.
+10%
Straightness / flat-
ness
±1.5
±2.5
±4
±6
μm
Max.
Velocity, unloaded 2000
2000
2000
2000
mm/s Max.
Positioning accura-
cy, uncalibrated
±3
±4
±8
±10
μm
Typ.
Motion
V-412.17
V-412.21
V-412.25
Unit
Toler-
ance
Active axes
X
X
X
Travel range
407
508
610
mm
Pitch / yaw
±39
±48
±58
μrad
Max.
+10%
Straightness / flat-
ness
±8
±9
±10
μm
Max.
Velocity, unloaded 2000
2000
2000
mm/s Max.
Positioning accura-
cy, uncalibrated
±12
±14
±15
μm
Typ.
Encoder options
V-412.xxx025Ex
Unit
Toler-
ance
Integrated sensor
Absolute-measuring linear encoder
Sensor signal
EnDat 2.2
Design Resolution
0.001
μm
Minimum Incremental Mo-
tion
10
nm
typ.
Bidirectional repeatability
±0.5
μm
typ.
Limit switches
–
12 TECHNICAL DATA
V412M0008EN
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5/11/2020
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