12
Technical Data
12.1
Specifications
Motion
V-417.05
V-417.09
V-417.13
V-417.17
Unit
Toler-
ance
Active axes
X
X
X
X
Travel range
102
204
305
407
mm
Pitch / yaw
±14
±19
±29
±39
μrad
max.
Straightness / flat-
ness
±2.5
±4
±6
±8
μm
max.
Velocity, unloaded 2000
2000
2000
2000
mm/s max.
Positioning accura-
cy, uncalibrated
±4
±8
±10
±12
μm
typ.
Motion
V-417.21
V-417.25
V-417.33
Unit
Toler-
ance
Active axes
X
X
X
Travel range
508
610
813
mm
Pitch / yaw
±40
±45
±50
μrad
max.
Straightness / flat-
ness
±9
±10
±12
μm
max.
Velocity, unloaded 2000
2000
2000
mm/s max.
Positioning accura-
cy, uncalibrated
±14
±15.5
±17
μm
typ.
Encoder options
V-417.xxx211Ex
Unit
Toler-
ance
Integrated sensor
Incremental linear encoder
Sensor signal
Sin/cos, 1 V peak-peak, 20 μm signal period
Design resolution
0.0003
μm
Minimum incremental mo-
tion
5
nm
typ.
Bidirectional repeatability
±0.5
μm
typ.
Limit switches
Hall effect, N/C contact, 5 V, NPN
12 TECHNICAL DATA
V417M0009EN
‒
4/26/2019
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