3 Product Description
Q-522 Miniature Stage
MP134E
Version: 1.0.1
7
In this Chapter
Model Overview ............................................................................................................. 7
Product View ............................................................................................................... 10
Product Labeling .......................................................................................................... 12
Scope of Delivery ........................................................................................................ 13
Accessories ................................................................................................................. 13
Suitable Electronics ..................................................................................................... 14
Technical Features ...................................................................................................... 15
3.1 Model Overview
Classification of the Q-522 models
Fifteen standard versions of the Q-522 stage are available. They differ in terms of the
following features:
Travel range
Dimensions
Equipment with a linear encoder:
sensor resolution 1 nm or sensor resolution 4 nm
Suitability for operation in vacuum
Model
Travel
range
Dimensions
Linear encoder
present
Vacuum
suitability (to
10
-9
hPa)
Q-522.000
6.5 mm
22 mm × 22 mm × 10 mm
No
No
Q-522.030
6.5 mm
32 mm × 22 mm × 10 mm
Yes (4 nm)
No
Q-522.040
6.5 mm
32 mm × 22 mm × 10 mm
Yes (1 nm)
No
Q-522.100
13 mm
22 mm × 32 mm × 10 mm
No
No
Q-522.130
13 mm
32 mm × 32 mm × 10 mm
Yes (4 nm)
No
Q-522.140
13 mm
32 mm × 32 mm × 10 mm
Yes (1 nm)
No
Q-522.200
26 mm
22 mm × 42 mm × 10 mm
No
No
Q-522.230
26 mm
32 mm × 42 mm × 10 mm
Yes (4 nm)
No
3
Product Description
