18
Tergeo plasma cleaner operator’s manual
Revision: B3, Year 2020
Plasma cleaner should be placed on a secure table space, connect the inlet port of the vacuum
pump to the pumping port of the plasma cleaner using stainless steel bellow or rubber hose.
The pumping port on the plasma cleaner is a standard NW25 flange. The pump must be set in
the mode that it can automatically start when the power plug is connected.
Please do not use oil pump with hydrocarbon oil to pump
concentrated oxygen. To pump high purity oxygen gas, oil
pump with inert PFPE pump oil or dry pump should be used.
Do not mix up the pump inlet port and the gas exhaust port on the
vacuum pump! If the plasma cleaner is connected to the exhaust port
on the vacuum pump, the pressure in the vacuum hose will rise to a
very high pressure. The high pressure will damage the pump valve in
the plasma cleaner and cause the vacuum leak issue. The pumping
port on the plasma cleaner should be connected to the inlet port on
the vacuum pump!!
Do not run rotary vane vacuum pump without adding sufficient
pump oil. If oil level is too high, oil can be carried out by exhaust
gas. Check the oil level weekly to make sure there is enough oil in
the oil pump. Do not mix PFPE oil with hydrocarbon oil.
Please make sure the pump exhaust port is not blocked or
closed before turning on pump power.
Do not let hydrogen gas exhaust enter the lab space. It must be
connected to a dedicated exhaust line. Contact lab safety
manager on how to handle hydrogen exhaust gas safely.
