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Tergeo plasma cleaner operator’s manual
Revision: B3, Year 2020
8)
Connect the compressed gas bottle to the corresponding gas inlet port with ¼ inch thick wall
PTFE Teflon tubing or metal tubing. When the gas tubing is first connected to the plasma
cleaner, the gas inside the tubing is mostly room air. To remove the room air inside the gas
tubing, pumping down the vacuum chamber, set the gas flow rate on the gas port to 99sccm.
Wait until all the gas has been pump out of the gas tubing. Then back fill the gas tubing with
the high purity process gas from the gas bottle. Plastic tubing always has some level of
permeability to room air. So if the plasma cleaner has been idle for several days, room air
will gradually leak into the plastic tubing, then the purity of the gas in the tubing will reduce.
The plasma intensity for the pure O2 plasma will increase significantly due to the N2 gas
impurity. The color of the pure O2 plasma should be pure white. If the gas is contaminated
with room air, the plasma will become purple. For most applications, the impurity doesn’t
affect the results. If the impurity is a concern, please choose metal tubing to reduce the
leakage of the room air impurity. Place the gas bottle as close as possible to shorten the
length of the gas tubing.
If the system has been idle for a long time, user can set the gas
flow rate to 99sccm for several minutes to flush out the impurity in the gas tubing before
running a critical recipe.
9)
If the continuous run current of the vacuum pump is below 7 amp, the plasma cleaner can
directly controls the power to the vacuum pump. Please connect the power cord of the
vacuum pump to the power outlet for the vacuum pump on the back of the plasma cleaner.
Then turn on the power switch on the vacuum pump.
