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Tergeo plasma cleaner operator’s manual
Revision: B3, Year 2020
Depending on purchasing option, up to three gas input ports can be integrated into the Tergeo plasma
cleaner.
Cleaning duration is specified as m seconds. Left box specifies minutes. Right box specifies
seconds.
Once a cleaning session finishes, the user can specify whether the system should purge the sample
chamber or not. The user can choose the venting port, gas 1, 2 or 3 as purging gas source. Duration of
the purging period can be adjusted in the system screen.
8.6 Run a cleaning recipe
8.6.1 Load a recipe to the main screen.
Recipes in the library can be loaded onto the main screen by typing the recipe number into the top left
corner of the main screen. Or simply load the recipe from the recipe screen. Once the recipe is loaded
to the main screen, it can be modified. However, the modified recipe will not be saved to the recipe
library. We suggest user modify the recipe in the recipe library screen and always load the recipes saved
in the library.
8.6.2 Turn on the vacuum pump
If the vacuum pump is not controlled by the plasma cleaner, please turn on the vacuum pump manually.
If the vacuum pump is plugged into the power outlet on the plasma cleaner, please make sure the
power button on the vacuum pump is kept ON.
8.6.3 Execute the recipe
Once the recipe is loaded and the vacuum pump is on, click the “Run Recipe” button in the top right
corner of the main screen to execute the recipe. For the immersion mode plasma cleaning, the steps of
a recipe execution are as follows:
1.
Pump down the chamber until background pressure reaches the upper limit pressure set in the
system screen, then the system will flush the chamber with the process gas. After the chamber
has been flushed with the process gas, the system will either set the gas flow rate to the recipe
setting or set the gas flow rate to zero. The choice can be made in the system screen by
selecting either “
ignite plasma before flowing gas
” or “
ignite plasma after flowing gas
”.
2.
Wait until the chamber pressure stabilizes or until the chamber pressure reaches the lower limit
threshold pressure set in the system screen.
