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Tergeo plasma cleaner operator’s manual
Revision: B3, Year 2020
before cleaning starts”
and below the
“Upper limit pressure before cleaning starts”,
recipe execution
will also proceed to the next step.
“Pressure stabilized criteria”
. The system constantly evaluates the stability of the chamber pressure. If
the pressure varies by less than the percentage specified in this tab within 5 seconds, the system will
consider the pressure as stabilized.
“Pressure Unit”
. The user can change the unit of the pressure display between “mTorr, Torr“ and “pa,
mBar”.
“MFC servo speed”
: This is to change the stabilization speed of the mass flow controller.
“Purging duration (ms)”
: After the plasma cleaning session finishes, the system can purge the sample
chamber. This tab specifies the duration of the purging step in milliseconds.
“Countdown TIMER when”
The user can switch the timer trigger between “RF ON” and “Plasma ON”.
Default timer trigger is “Plasma ON”. If the plasma is too weak to be detected by the plasma sensor or
the plasma sensor fails, the user can change to “RF ON” as the timer trigger.
“Leave the pump on after cleaning”:
This item controls whether system closes the pumping valve
after plasma cleaning step finishes.
“Vent chamber after cleaning finishes”:
This item controls whether system automatically vents the
chamber once the plasma cleaning recipe finishes.
“Calibrate autotuner”:
It will find the zero and the maximum positions for the auto tuner motor.
Updated maximum travel range will be displayed to the right of the button. The user has to exit and re-
enter the system screen for this value to be updated.
“Set autotuner position”:
If the autotuner function doesn’t work properly, the user can directly specify
the tuning motor position. To maintain the manually specified motor position, autotuner should be
disabled. To help the plasma ignite, set the motor position close to the maximum value. For low plasma
density recipe (>200mTorr or low rf power), the user should set the motor position close to the
maximum motor position value. For high plasma density recipe, the user should set motor position close
to lower end of the position. To fix the impedance matching for all conditions, manually set the motor
position to a value that equals the maximum value minus 2000. For example, if the maximum travel
range is 10624, the motor position should be set to 8624 for fixed impedance matching.
“Autotuner Setting”:
The user can choose to disable the autotuner function, use normal fast autotuner
routine or use long range autotuner routine. Long range autotuner routine can better prevent the
autotuner to converge to local minima.
“Automatically re-tuning for optimized recipes during recipe execution”:
If this feature is enabled, the
system will check the current plasma intensity reading with the optimized plasma intensity reading
